公开(公告)号：US20220236304A1

公开(公告)日：2022-07-28

申请号：US17587898

申请日：2022-01-28

Applicant: FormFactor, Inc.

Inventor： Sterling Tadashi Collins ,  Jason William Cosman ,  Lich Thanh Tran ,  Vinh-Lam Olivier Buu

IPC: G01R1/073

Abstract: Vertical probe arrays having angled guide plates are provided. With this configuration, the probes can be straight conductors (when mechanically undeformed) and the mechanical bias provided by the angled guide plates can ensure the probes have a well-defined deformation when the probe array make contact to the device under test. This allows the use of straight conductors as probes without suffering from probe shorting and mechanical interference caused by straight probes buckling in unpredictable directions when vertically compressed.