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公开(公告)号:US20200335619A1
公开(公告)日:2020-10-22
申请号:US16386902
申请日:2019-04-17
Applicant: GLOBALFOUNDRIES INC.
Inventor: Yanping SHEN , Haiting WANG , Hui ZANG , Jiehui SHU
IPC: H01L29/78 , H01L21/8238 , H01L21/8234 , H01L29/66
Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to middle of line gate structures and methods of manufacture. The structure includes: a plurality of adjacent gate structures; a bridged gate structure composed of a plurality of the adjacent gate structures; source and drain regions adjacent to the bridged gate structure and comprising source and drain metallization features; and contacts to the bridged gate structure and the source and drain metallization features.