公开(公告)号：US10090258B1

公开(公告)日：2018-10-02

申请号：US15713843

申请日：2017-09-25

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Kevin Boyd ,  Robert Fox ,  Jeannine Trewhella ,  Roderick Alan Augur ,  Nicholas A. Polomoff

IPC: H01L23/00 ,  H01L23/31 ,  H01L21/768 ,  H01L23/535

Abstract: One illustrative crack-stop structure disclosed herein may include a first crack-stop metallization layer comprising a first metal line layer that has a plurality of openings formed therein and a second crack-stop metallization layer positioned above and adjacent the first crack-stop metallization layer, wherein the second crack-stop metallization layer has a second metal line layer and a via layer, and wherein the via layer comprises a plurality of vias having a portion that extends at least partially into the openings in the first metal line layer of the first crack-stop metallization layer so as to thereby form a stepped, non-planar interface between the first metal line layer of the first crack-stop metallization layer and the via layer of the second crack-stop metallization layer.