公开(公告)号：US11567260B1

公开(公告)日：2023-01-31

申请号：US17501508

申请日：2021-10-14

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Won Suk Lee ,  Lin Jiang ,  Colleen Meagher

IPC: G02B6/122 ,  G02B6/36 ,  H01L31/0232

Abstract: Structures including an optical component and methods of forming a structure including an optical component. The structure includes an optical component on a substrate, and a back-end-of-line stack including multiple metal levels. Each of the metal levels includes a dielectric layer and metal features positioned over the optical component as metal fill in the dielectric layer. The metal features in at least two of the metal levels are arranged to overlap such that the optical component is fully covered normal to the substrate.