公开(公告)号：US07126681B1

公开(公告)日：2006-10-24

申请号：US10421626

申请日：2003-04-23

申请人： George Q. Chen ,  Lih-Huah Yiin ,  Yu Cao

发明人： George Q. Chen ,  Lih-Huah Yiin ,  Yu Cao

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/956

摘要： A method and apparatus for inspecting specimens or patterned transmissive substrates, such as photomasks, for unwanted particles and features, particularly those associated with contacts, including irregularly shaped contacts. A specimen is illuminated by a laser through an optical system comprised of a laser scanning system, individual transmitted and/or reflected light collection optics and detectors collect and generate signals representative of the light transmitted by the substrate. The defect identification of the substrate is performed using those transmitted light signals. Defect identification is performed using an inspection algorithm by comparing image feature representations of a test specimen with a reference specimen, and using a boundary computer and flux comparison device to establish tight boundaries around contacts and compute flux differences between the test and reference specimen contacts. Defect sizes are reported as ratio of flux difference, and entire contacts are highlighted for review.

公开(公告)号：US07499156B2

公开(公告)日：2009-03-03

申请号：US11584714

申请日：2006-10-19

申请人： George Q. Chen ,  Lih-Huah Yiin ,  Yu Cao

发明人： George Q. Chen ,  Lih-Huah Yiin ,  Yu Cao

IPC分类号： G01N21/00

CPC分类号： G01N21/9501 ,  G01N21/956

摘要： A method and apparatus for inspecting specimens or patterned transmissive substrates, such as photomasks, for unwanted particles and features, particularly those associated with contacts, including irregularly shaped contacts. A specimen is illuminated by a laser through an optical system comprised of a laser scanning system, individual transmitted and/or reflected light collection optics and detectors collect and generate signals representative of the light transmitted by the substrate. The defect identification of the substrate is performed using those transmitted light signals. Defect identification is performed using an inspection algorithm by comparing image feature representations of a test specimen with a reference specimen, and using a boundary computer and flux comparison device to establish tight boundaries around contacts and compute flux differences between the test and reference specimen contacts. Defect sizes are reported as ratio of flux difference, and entire contacts are highlighted for review.

摘要翻译： 用于检查样品或图案化的透射基底（例如光掩模）的方法和装置，用于不期望的颗粒和特征，特别是与触点相关联的那些，包括不规则形状的触点。 通过由激光扫描系统，单独发射和/或反射光收集光学器件组成的光学系统，激光照射样品，并且检测器收集并产生表示由衬底透射的光的信号。 使用这些透射光信号进行衬底的缺陷识别。 通过比较测试样本的图像特征表示和参考样本，并使用边界计算机和通量比较装置在接触周围建立紧密的边界并计算测试和参考样本接触之间的通量差，使用检查算法执行缺陷识别。 缺陷尺寸报告为通量差的比率，并且整个触点被突出显示以供审查。

公开(公告)号：US07167185B1

公开(公告)日：2007-01-23

申请号：US10396228

申请日：2003-03-24

申请人： Lih-Huah Yiin ,  Yen-Wen Lu ,  George Q. Chen

发明人： Lih-Huah Yiin ,  Yen-Wen Lu ,  George Q. Chen

IPC分类号： G09G5/02

CPC分类号： G03F1/84 ,  G06T7/0004 ,  G06T2207/30148

摘要： Faster and more accurate techniques for displaying images are described. The techniques can be applied in various applications that include semiconductor fabrication processes. The invention uses preprocessed images to generate a user-selected image in order to increase the speed of image processing. The invention displays the pixels forming an image using grayscale shading in order to improve the accuracy of displaying the patterns used in photolithography processes. The techniques of the present invention can be used to display images that represent lithography patterns stored within memory devices or to display images captured by inspection or metrology devices.

摘要翻译： 描述更快更准确的显示图像的技术。 这些技术可以应用于包括半导体制造工艺的各种应用中。 本发明使用预处理图像来生成用户选择的图像，以便提高图像处理的速度。 本发明使用灰度阴影显示形成图像的像素，以便提高显示在光刻工艺中使用的图案的精度。 本发明的技术可以用于显示表示存储在存储器件内的光刻图案的图像，或者显示由检查或计量装置捕获的图像。

公开(公告)号：US07027635B1

公开(公告)日：2006-04-11

申请号：US10193965

申请日：2002-07-10

申请人： Mark J. Wihl ,  George Q. Chen ,  Jun Ye ,  Lih-Huah Yiin ,  Pei-Chun Chiang

发明人： Mark J. Wihl ,  George Q. Chen ,  Jun Ye ,  Lih-Huah Yiin ,  Pei-Chun Chiang

IPC分类号： G06K9/00

CPC分类号： G06T7/001 ,  G03F1/30 ,  G03F1/50 ,  G03F1/84 ,  G06T2207/30148

摘要： Techniques that use the design databases used in each of the expose/etch steps during construction of phase shift masks are described. A model or reference image is rendered, accounting for systematic variations, from the design databases to represent what a layer of the PSM should look like after processing. The reference image is compared to an optically acquired image of a specimen phase shift mask to find defects. The technique of the present invention can be used to inspect EAPSM, APSM and tritone masks. The technique inspects all layers in one pass and is therefore more efficient.

摘要翻译： 描述了在构造相移掩模期间使用在每个曝光/蚀刻步骤中使用的设计数据库的技术。 渲染来自设计数据库的模型或参考图像，以计算系统的变化，以表示处理后的PSM层的外观。 将参考图像与样本相移掩模的光学获取图像进行比较以发现缺陷。 本发明的技术可用于检查EAPSM，APSM和三色面罩。 该技术在一次通过中检查所有层，因此效率更高。

公开(公告)号：US07444013B2

公开(公告)日：2008-10-28

申请号：US09927558

申请日：2001-08-10

申请人： George Q. Chen

发明人： George Q. Chen

IPC分类号： G06K9/00 ,  G06T17/00 ,  G01B11/24 ,  G01B11/30

CPC分类号： G06K9/32 ,  G06T7/596

摘要： An image processing system recovers 3-D depth information for pixels of a base image representing a view of a scene. The system detects a plurality of pixels in a base image that represents a first view of a scene. The system the determines 3-D depth of the plurality of pixels in the base image by matching correspondence to a plurality of pixels in a plurality of images representing a plurality of views of the scene. The system then traces pixels in a virtual piecewise continuous depth surface by spatial propagation starting from the detected pixels in the base image by using the matching and corresponding plurality of pixels in the plurality of images to create the virtual piecewise continuous depth surface viewed from the base image, each successfully traced pixel being associated with a depth in the scene viewed from the base image.

摘要翻译： 图像处理系统恢复表示场景视图的基本图像的像素的3-D深度信息。 系统检测表示场景的第一视图的基本图像中的多个像素。 该系统通过与表示场景的多个视图的多个图像中的多个像素匹配对应来确定基本图像中的多个像素的3-D深度。 然后，该系统通过使用多个图像中的匹配和对应的多个像素从基底中检测到的像素开始，从虚拟的分段连续深度表面中追踪像素，从而从基底 图像，每个成功跟踪的像素与从基本图像观看的场景中的深度相关联。

公开(公告)号：US07268804B2

公开(公告)日：2007-09-11

申请号：US10407505

申请日：2003-04-04

申请人： George Q. Chen ,  Li Hong ,  Peter McGuinness

发明人： George Q. Chen ,  Li Hong ,  Peter McGuinness

IPC分类号： H04N5/225 ,  H04N5/262

CPC分类号： G06K9/209 ,  G06T5/003 ,  G06T5/50 ,  G06T15/20 ,  G06T2207/10028 ,  H04N5/2258 ,  H04N5/23229

摘要： A compound camera system comprising component cameras that generate image data of an object and a processor that receives first image data from a first component camera and second image data from a second component camera and generates a virtual image. The processor projects virtual pixel data (u,v) to generate point data (x,y,z) located at depth, z=Z1, of a object plane of the object and projects the said point data (x,y,z) to generate first pixel data (u1,v1) located at a image plane of the first image. The processor also projects said point data (x,y,z) located at the depth, z=Z1, of the said object plane to generate second pixel data (u2,v2) located at the second image. The processor generates the virtual image by combining the color of first pixel data (u1,v1) and the color of second pixel data (u2,v2)

摘要翻译： 一种复合照相机系统，包括产生对象的图像数据的组件相机和从第一组件相机接收第一图像数据的处理器和来自第二组件相机的第二图像数据，并生成虚拟图像。 处理器投影虚像素数据（u，v）以产生位于物体的物平面的深度z = Z 1处的点数据（x，y，z），并投影所述点数据（x，y，z） ）以产生位于第一图像的像平面处的第一像素数据（u 1，v 1，1）。 处理器还投影位于所述物体平面的深度z = Z1处的所述点数据（x，y，z），以产生第二像素数据（u 2，v 2， / SUB>）。 处理器通过将第一像素数据（u> 1，v 1> 1）的颜色和第二像素数据的颜色（u> 2 SUB>，v＆lt; 2＆gt;）

公开(公告)号：US08264541B2

公开(公告)日：2012-09-11

申请号：US12004452

申请日：2007-12-20

申请人： George Q. Chen ,  Li Hong ,  Peter McGuinness

发明人： George Q. Chen ,  Li Hong ,  Peter McGuinness

IPC分类号： H04N7/18

CPC分类号： H04N5/247 ,  G06K9/209 ,  G06T15/20 ,  G06T2200/21 ,  G06T2207/10052 ,  H04N5/23232

摘要： A compound camera system for generating an enhanced virtual image having a large depth-of-field. The compound camera system comprises a plurality of component cameras for generating image data of an object and a data processor for generating the enhanced virtual image from the image data. The data processor generates the enhanced virtual image by generating a first component virtual image at a first depth plane, generating a second component virtual image at a second depth plane, and inserting first selected pixels from the first component virtual image into enhanced the virtual image and inserting second selected pixels from the second component virtual image into the enhanced virtual image.

摘要翻译： 一种复合照相机系统，用于产生具有较大景深的增强的虚像。 复合摄像机系统包括用于生成对象的图像数据的多个分量摄像机和用于从图像数据生成增强的虚像的数据处理器。 数据处理器通过在第一深度平面处产生第一分量虚拟图像来生成增强的虚拟图像，在第二深度平面处生成第二分量虚拟图像，并且将来自第一分量虚拟图像的第一选定像素插入增强的虚拟图像，以及 将第二选定像素从第二分量虚拟图像插入到增强的虚像中。

公开(公告)号：US06834119B2

公开(公告)日：2004-12-21

申请号：US09825266

申请日：2001-04-03

申请人： George Q. Chen

发明人： George Q. Chen

IPC分类号： G06K900

CPC分类号： G06T7/55 ,  G06T7/33 ,  H04N13/243

摘要： An image processing system detects a plurality of image features in a first image corresponding to a first view of a scene, and a plurality of image features in a second image corresponding to a second view of the scene. The second image deviates from the first image as a result of camera relative motion. The system determines a two-view correspondence resulting in a potential match set having a maximum average strength of correspondence based at least in part on the total number of matching neighbor candidate image features. Additionally, a multiple-view correspondence between images results in a potential match set based at least in part on a computation of reprojection error for matched points that resulted from a projective reconstruction of the potential match set.

摘要翻译： 图像处理系统检测对应于场景的第一视图的第一图像中的多个图像特征，以及对应于场景的第二视图的第二图像中的多个图像特征。 由于相机相对运动，第二个图像偏离第一个图像。 该系统至少部分地基于匹配的相邻候选图像特征的总数来确定产生具有最大平均对应强度的潜在匹配集合的双视图对应。 另外，图像之间的多视图对应至少部分地基于由潜在匹配集的投影重构产生的匹配点的重新投影误差的计算，导致潜在的匹配集合。

公开(公告)号：US07425984B2

公开(公告)日：2008-09-16

申请号：US10407490

申请日：2003-04-04

申请人： George Q. Chen ,  Li Hong ,  Peter McGuinness

发明人： George Q. Chen ,  Li Hong ,  Peter McGuinness

IPC分类号： H04N7/18 ,  H04N5/225 ,  H04N5/262

CPC分类号： H04N5/247 ,  G06K9/209 ,  G06T15/20 ,  G06T2200/21 ,  G06T2207/10052 ,  H04N5/23232

摘要： A compound camera system for generating an enhanced virtual image having a large depth-of-field. The compound camera system comprises a plurality of component cameras for generating image data of an object and a data processor for generating the enhanced virtual image from the image data. The data processor generates the enhanced virtual image by generating a first component virtual image at a first depth plane, generating a second component virtual image at a second depth plane, and inserting first selected pixels from the first component virtual image into enhanced the virtual image and inserting second selected pixels from the second component virtual image into the enhanced virtual image.

公开(公告)号：US07046352B1

公开(公告)日：2006-05-16

申请号：US10325023

申请日：2002-12-19

申请人： Aditya Dayal ,  David S. Alles ,  George Q. Chen

发明人： Aditya Dayal ,  David S. Alles ,  George Q. Chen

IPC分类号： G01N21/00

CPC分类号： G03F1/84 ,  G01N21/93 ,  G06T7/0004 ,  G06T2207/30148

摘要： The present invention discloses methods of conducting surface inspections using summed light. One method includes the steps of measuring summed light intensity values for the substrate, generating comparison values for the substrate, and then comparing the measured summed light intensity values with the comparison values to determine whether there are defects in the substrate. In another embodiment, a method includes the steps of generating a reference cluster using measured summed light intensity values for selected portions of the inspection surface. Other summed light intensity values are measured and then compared with the reference cluster. Using this comparison, a determination is made as to whether a defect is present. Another embodiment uses a constant baseline signal which is compared to actual light intensity values to determine whether a substrate defect is present. In yet another embodiment a substrate is inspected for the presence of defects by conducting a pixel-by-pixel summed light inspection of the substrate.

摘要翻译： 本发明公开了使用求和光进行表面检查的方法。 一种方法包括以下步骤：测量衬底的求和光强度值，产生衬底的比较值，然后将测得的相加光强度值与比较值进行比较，以确定衬底中是否存在缺陷。 在另一个实施例中，一种方法包括以下步骤：使用对检查表面的选定部分的测量的相加的光强度值来生成参考簇。 测量其他总和光强值，然后与参考簇进行比较。 使用该比较，确定是否存在缺陷。 另一实施例使用与实际光强度值进行比较的恒定基线信号，以确定是否存在基板缺陷。 在另一个实施例中，通过对衬底进行逐像素求和的光检查来检查衬底的存在缺陷。