公开(公告)号：US10073353B2

公开(公告)日：2018-09-11

申请号：US15260625

申请日：2016-09-09

Applicant: Gigaphoton Inc.

Inventor： Yutaka Shiraishi ,  Hideki Shishiba

IPC: G03B27/42 ,  G03F7/20 ,  H01L21/027 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H01L21/027 ,  H05G2/005 ,  H05G2/006 ,  H05G2/008

Abstract: A target supply device may include a tank for storing a target material, a nozzle which is connected to the tank and outputs the target material, and a gas supply section for supplying the tank with gas. The gas supply section may include a booster which is connected to a gas line, boosts the gas supplied from the gas line, and outputs the boosted gas to the tank, a pressure sensor for measuring the pressure inside the tank, and a pressure controller which adjusts the pressure of the gas to be supplied to the tank on the basis of a measurement result from the pressure sensor.

公开(公告)号：US12150233B2

公开(公告)日：2024-11-19

申请号：US17831255

申请日：2022-06-02

Applicant: Gigaphoton Inc.

Inventor： Yutaka Shiraishi ,  Hideki Shishiba

IPC: H05G2/00 ,  G03F7/00 ,  H01L21/027

Abstract: A target substance replenishment device may include a first container containing a solid target substance, a first path through which the solid target substance supplied from the first container passes, a first supply switching device switching between a first state where supply of the solid target substance from the first container to the first path is suppressed and a second state where the supply of the solid target substance from the first container to the first path is allowed, a first valve connected to the first path, a second path which is connected to the first valve and through which the solid target substance having passed through the first valve passes, a first detector outputting a first detection signal indicating that the second path is clogged with the solid target substance, and a processor controlling the first supply switching device to the first state based on the first detection signal.