公开(公告)号：US12207382B2

公开(公告)日：2025-01-21

申请号：US18163023

申请日：2023-02-01

Applicant: Gigaphoton Inc.

Inventor： Nozomu Oue ,  Yutaka Shiraishi

IPC: H05G2/00 ,  G03F7/00 ,  G03F7/20 ,  G21K1/06

Abstract: A target supply system includes a target generation unit configured to generate a liquid target substance by melting a solid target substance at an inside thereof, and output the liquid target substance; an input mechanism configured to introduce the solid target substance to the target generation unit; a heater arranged at the target generation unit; a sensor configured to detect a temperature of the target generation unit; and a processor configured to control an input timing at which the solid target substance is introduced to the target generation unit, perform feedback control on the heater based on a present temperature detected by the sensor, and perform feedforward control on the heater based on the input timing while performing feedback control on the heater.