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公开(公告)号：US20230187892A1
公开(公告)日：2023-06-15
申请号：US18163689
申请日：2023-02-02
Applicant: Gigaphoton Inc.
Inventor： Yusuke SAITO , Masanori YASHIRO , Hiroshi FURUSATO , Yosuke WATANABE , Tokinori TERAO
CPC classification number: H01S3/08009 , H01S3/034 , H01S3/105 , G03F7/70025
Abstract: A line narrowing gas laser device includes a line narrowing device, an output coupling mirror, a laser chamber arranged on an optical path of an optical resonator, a first holder which supports the output coupling mirror, a second holder which supports the first holder to be rotatable about a rotation axis of the first holder, and an adjustment device supported by the second holder and being in contact with the first holder to rotate the first holder about the rotation axis. The line narrowing device has a characteristic of changing, into a first direction, beam pointing of laser light output toward the output coupling mirror when temperature inside the line narrowing device rises. The second holder and the adjustment device rotate the first holder in a direction in which a change in the first direction in the beam pointing of the laser light is suppressed by thermal expansion.
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公开(公告)号：US20210116294A1
公开(公告)日：2021-04-22
申请号：US17113759
申请日：2020-12-07
Applicant: Gigaphoton Inc.
Inventor： Yosuke WATANABE , Masato MORIYA
Abstract: An energy measuring apparatus according to one aspect of the present disclosure includes a first beam splitter, a second beam splitter, a third beam splitter, and a fourth beam splitter, which sequentially reflect part of a main beam and input the beam to an energy sensor. The first beam splitter, the second beam splitter, the third beam splitter, and the fourth beam splitter are each arranged to have such an incident angle and a folding direction of an optical path as to suppress a change in detection value of the energy sensor due to a change in incident angle and a change in polarization purity of the main beam.
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