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公开(公告)号:US20170219619A1
公开(公告)日:2017-08-03
申请号:US15086081
申请日:2016-03-31
Applicant: GlobalMEMS Co., Ltd.
Inventor: Chun-I Chang , Ming-Ching Wu
IPC: G01P15/12
CPC classification number: G01P15/123 , G01P15/0802 , G01P15/18 , G01P2015/0828 , G01P2015/0831
Abstract: An accelerometer includes a base, two elastic portions and two masses. The base includes a supporting portion. Each of the elastic portions is connected to the supporting portion. The supporting portion is located between the two masses, the two masses are connected to the two elastic portions respectively, and the base supports the two elastic portions and the two masses merely by the supporting portion. The two masses are adapted to produce movements to enable the two elastic portions to be elastically deformed.