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公开(公告)号：US20180376251A1
公开(公告)日：2018-12-27
申请号：US15662299
申请日：2017-07-28
Applicant: GlobalMEMS Co., Ltd.
Inventor： Shih-Hsiung Tseng , Ming-Ching Wu
Abstract: An electro-acoustic transducer includes a base and at least a vibration portion. The vibration portion includes a piezoelectric transducer layer and is connected to the base. The piezoelectric transducer layer includes an upper electrode layer and a piezoelectric material layer. The piezoelectric material layer has a first zone and a second zone, wherein at least a part of the upper electrode layer is disposed in the first zone, and the piezoelectric material layer has a plurality of first holes in the second zone. The piezoelectric transducer layer is adapted to receive an electrical signal to deform, such that the vibration portion is driven to vibrate and generate a corresponding acoustic wave. The vibration portion is adapted to receive an acoustic wave to vibrate, such that the piezoelectric transducer layer is driven to deform and generate a corresponding electrical signal.
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公开(公告)号：US10067014B1
公开(公告)日：2018-09-04
申请号：US15494545
申请日：2017-04-24
Applicant: GlobalMEMS Co., Ltd.
Inventor： Hsi-Wen Tung , Ming-Ching Wu
Abstract: A force sensor including a sensing element and a circuit board is provided. The sensing element has a top surface and a bottom surface opposite to each other and has a sensing portion, wherein the sensing portion is located at the top surface. The circuit board is disposed above the top surface and electrically connected to the sensing element, Wherein the sensing portion is adapted to generate a sensing signal through an external force transferred from the circuit board to the top surface.
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公开(公告)号：US20170219619A1
公开(公告)日：2017-08-03
申请号：US15086081
申请日：2016-03-31
Applicant: GlobalMEMS Co., Ltd.
Inventor： Chun-I Chang , Ming-Ching Wu
IPC: G01P15/12
CPC classification number: G01P15/123 , G01P15/0802 , G01P15/18 , G01P2015/0828 , G01P2015/0831
Abstract: An accelerometer includes a base, two elastic portions and two masses. The base includes a supporting portion. Each of the elastic portions is connected to the supporting portion. The supporting portion is located between the two masses, the two masses are connected to the two elastic portions respectively, and the base supports the two elastic portions and the two masses merely by the supporting portion. The two masses are adapted to produce movements to enable the two elastic portions to be elastically deformed.
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公开(公告)号：US09756428B1
公开(公告)日：2017-09-05
申请号：US15099617
申请日：2016-04-15
Applicant: GlobalMEMS Co., Ltd.
Inventor： Shih-Hsiung Tseng , Ming-Ching Wu
CPC classification number: H04R17/02 , H04R3/005 , H04R19/04 , H04R2209/026 , H04R2400/01
Abstract: An electro-acoustic transducer includes a base, a plurality of vibration portions and a connection portion. Each of the vibration portion includes a piezoelectric transduction layer and has a first connection end and a second connection end opposite to each other, and the first connection ends are connected to the base. The connection portion is separated from the base and connected to the second connection ends. The piezoelectric transduction layers are adapted to receive electrical signals to deform, such that the vibration portions are driven to vibrate and generate corresponding acoustic waves. The vibration portions are adapted to receive acoustic waves to vibrate, such that the piezoelectric transduction layers are driven to deform and generate corresponding electrical signals.
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公开(公告)号：US20170233248A1
公开(公告)日：2017-08-17
申请号：US15132239
申请日：2016-04-19
Applicant: GlobalMEMS Co., Ltd.
Inventor： Hsi-Wen Tung , Ming-Ching Wu
CPC classification number: B81C1/00182 , B81B2201/0264 , B81B2201/0278 , B81B2203/0127 , B81B2207/07
Abstract: A micro sensor including a first substrate and a second substrate is provided. The first substrate has a surface with a cavity. The second substrate has a sensing structure. The surface of the first substrate with the cavity is bonded to the second substrate to seal the cavity, such that a pressure value in the cavity is a constant value. A manufacturing method thereof is also provided.
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Patent Agency Ranking
公开(公告)号：US20180252601A1
公开(公告)日：2018-09-06
申请号：US15494545
申请日：2017-04-24
Applicant: GlobalMEMS Co., Ltd.
Inventor： Hsi-Wen Tung , Ming-Ching Wu
Abstract: A force sensor including a sensing element and a circuit board is provided. The sensing element has a top surface and a bottom surface opposite to each other and has a sensing portion, wherein the sensing portion is located at the top surface. The circuit board is disposed above the top surface and electrically connected to the sensing element, wherein the sensing portion is adapted to generate a sensing signal through an external force transferred from the circuit board to the top surface.
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公开(公告)号：US20170234744A1
公开(公告)日：2017-08-17
申请号：US15134395
申请日：2016-04-21
Applicant: GlobalMEMS Co., Ltd.
Inventor： Hsi-Wen Tung , Ming-Ching Wu
CPC classification number: G01L1/18 , B81B7/0016 , B81B2201/0264 , B81B2201/0292 , G01L1/2293 , G01L1/26 , G01L5/162 , G06F3/0414
Abstract: A MEMS force sensor including a first substrate, a second substrate and a plurality of conductive terminals is provided. The second substrate is disposed opposite to the first substrate and includes a deformable portion and a force receiving portion. The deformable portion has a plurality of sensing elements. The force receiving portion protrudes from a surface of the deformable portion which is back facing to the first substrate, such that a cavity is formed above the deformable portion. The conductive terminals are electrically connected to the sensing elements, and the conductive terminals are centrally disposed under the cavity. The second substrate is fixed with the first substrate through the conductive terminals. A force sensing apparatus is also provided.
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公开(公告)号：US20190339509A1
公开(公告)日：2019-11-07
申请号：US16392537
申请日：2019-04-23
Applicant: Coretronic Corporation , GlobalMEMS Co., Ltd.
Inventor： Fu-Ming Chuang , Wei-Yao Hsu , Ming-Ching Wu , Hsi-Wen Tung
IPC: G02B26/08 , H01L41/047 , H01L41/083 , H01L41/09
Abstract: A variable focal length optical element including a first substrate, at least one piezoelectric thin film, a reflection layer and multiple driving electrodes is provided. The first substrate has a first chamber. The at least one piezoelectric thin film is located on the first substrate. The reflection layer is located on a surface of the at least one piezoelectric thin film. The driving electrodes are located on the first substrate, and surround the first chamber. The at least one piezoelectric thin film is respectively driven by the corresponding driving electrodes, and each driving electrode respectively applies a driving voltage to the at least one piezoelectric thin film to deform the at least one piezoelectric thin film. The at least one piezoelectric thin film is adapted to effectively maintain optical quality of the variable focal length optical element under different environmental conditions, and avails improving reliability thereof.
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公开(公告)号：US20170238100A1
公开(公告)日：2017-08-17
申请号：US15099617
申请日：2016-04-15
Applicant: GlobalMEMS Co., Ltd.
Inventor： Shih-Hsiung Tseng , Ming-Ching Wu
CPC classification number: H04R17/02 , H04R3/005 , H04R19/04 , H04R2209/026 , H04R2400/01
Abstract: An electro-acoustic transducer includes a base, a plurality of vibration portions and a connection portion. Each of the vibration portion includes a piezoelectric transduction layer and has a first connection end and a second connection end opposite to each other, and the first connection ends are connected to the base. The connection portion is separated from the base and connected to the second connection ends. The piezoelectric transduction layers are adapted to receive electrical signals to deform, such that the vibration portions are driven to vibrate and generate corresponding acoustic waves. The vibration portions are adapted to receive acoustic waves to vibrate, such that the piezoelectric transduction layers are driven to deform and generate corresponding electrical signals.
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公开(公告)号：US20170238099A1
公开(公告)日：2017-08-17
申请号：US15131041
申请日：2016-04-18
Applicant: GlobalMEMS Co., Ltd.
Inventor： Shih-Hsiung Tseng , Ming-Ching Wu
IPC: H04R17/00
CPC classification number: H04R17/005 , H04R7/06 , H04R17/00 , H04R19/005 , H04R23/006 , H04R2201/003 , H04R2217/01 , H04R2400/01
Abstract: An electro-acoustic transducer includes a base and a plurality of vibration portions. Each of the vibration portions includes a piezoelectric transduction layer and has two connection ends and a free end. The connection portions are connected to the base, and the free ends are separated from one another. The piezoelectric transduction layers are adapted to receive electrical signals to deform, such that the vibration portions are driven to vibrate and generate corresponding acoustic waves. The vibration portions are adapted to receive acoustic waves to vibrate, such that the piezoelectric transduction layers are driven to deform and generate corresponding electrical signals.
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