公开(公告)号：US20180335445A1

公开(公告)日：2018-11-22

申请号：US15775116

申请日：2016-11-16

Applicant: SAFRAN ELECTRONICS & DEFENSE

Inventor： Vincent RAGOT ,  Damien CARRE ,  Philippe ULLAH ,  Alain BOUTEILLOUX ,  Nicolas BIGOURIE

IPC: G01P15/13 ,  G01P15/125

CPC classification number: G01P15/125 ,  G01P15/131 ,  G01P2015/0828

Abstract: An accelerometer sensor having electrodes forming capacitors of capacitance that vary as a function of distances between the electrodes, a control unit being arranged to perform an operation of measuring the capacitances and a control operation that comprises selectively: a fine control stage in which a first voltage is applied between one of the stationary electrodes and the movable electrode, while the other stationary electrode is at the same potential as the movable electrode; and an extended control stage in which a second voltage is applied between one of the stationary electrodes and the movable electrode, the other stationary electrode being at the same potential as the movable electrode, and the second voltage being greater in absolute value than the first voltage.A method using such a sensor.

公开(公告)号：US09952250B2

公开(公告)日：2018-04-24

申请号：US14829801

申请日：2015-08-19

Applicant: YOKOGAWA ELECTRIC CORPORATION

Inventor： Yusaku Yoshida ,  Takashi Yoshida ,  Atsushi Yumoto

IPC: G01P15/097 ,  G01P15/08

CPC classification number: G01P15/097 ,  G01P2015/0828

Abstract: A resonant sensor includes a mover that is movable in a first direction, a supporter that extends in a second direction perpendicular to the first direction, the supporter being connected to the mover and a fixer, the supporter supporting the mover which is movable in the first direction, and a resonator that is vibratable, at least a part of the resonator being embedded in the supporter.

公开(公告)号：US09753057B2

公开(公告)日：2017-09-05

申请号：US14499324

申请日：2014-09-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Takuo Hada ,  Katsumi Fujimoto ,  Hideya Horiuchi ,  Toshimaro Yoneda

IPC: G01P15/097 ,  G01P15/10 ,  G01P15/09 ,  G01P15/08

CPC classification number: G01P15/10 ,  G01P15/09 ,  G01P15/097 ,  G01P2015/0828

Abstract: An acceleration sensor includes a fixation member, a weight member including a plate with two opposing sides parallel or substantially parallel to an X-direction and two opposing sides parallel to a Y-axis direction in a plan view, the weight member including a cutout extending in a direction about 45° relative to the X and Y axis directions, a vibrating beam linearly extending in the direction about 45° relative to the X and Y axis directions in the plan view, and one end portion is connected to the fixation member and the other end portion is connected to the weight member, the vibrating beam is partly arranged within the cutout and supporting the weight member to be displaceable in a Z-axis direction, a driver disposed on the vibrating beam and vibrating the vibrating beam, and a detector disposed on the vibrating beam and outputting a detection signal that is changed depending on deformation of the vibrating beam.

公开(公告)号：US09650237B2

公开(公告)日：2017-05-16

申请号：US14778514

申请日：2014-04-17

Applicant: Agency for Science, Technology and Research

Inventor： Ilker E. Ocak ,  Julius Ming Lin Tsai ,  Navab Singh

IPC: B81B7/00 ,  H01L25/00 ,  G01C19/56 ,  G01R33/00 ,  G01R33/028 ,  G01P15/08 ,  G01P15/125 ,  B81C1/00

CPC classification number: B81B7/0048 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0271 ,  B81B2201/0292 ,  B81B2203/04 ,  B81B2207/07 ,  B81C1/00285 ,  B81C2203/0118 ,  B81C2203/0172 ,  G01C19/56 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828 ,  G01R33/00 ,  G01R33/0052 ,  G01R33/0286 ,  H01L25/00 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An electromechanical device and method of fabrication thereof comprising: providing a first wafer with a circuit arrangement on a first surface thereof and a first electrode on a second surface thereof; forming first and second via structures from the first surface to the second surface of the first wafer, said first via electrically connecting the first electrode with the circuit arrangement; providing a second wafer with a suspended structure on a first surface thereof; forming a second electrode on the suspended structure; forming an interconnect structure on the first surface of the second wafer that electrically connects with the second electrode; bonding the first wafer to the second wafer with the second surface of the first wafer facing the first surface of the second wafer, with the second via structure electrically connecting the circuit arrangement to the interconnect structure, and the first and second electrodes forming a capacitive structure.

公开(公告)号：US09488671B2

公开(公告)日：2016-11-08

申请号：US14349043

申请日：2012-09-24

Applicant: ISRAEL AEROSPACE INDUSTRIES LTD.

Inventor： Oren Levy

IPC: G01P15/02 ,  G01P15/13 ,  G01P1/00 ,  G01P1/02 ,  G01P15/08

CPC classification number: G01P15/02 ,  G01P1/006 ,  G01P1/023 ,  G01P15/13 ,  G01P2015/0828

Abstract: An accelerometer for sensing acceleration along a sensing axis, includes a flexure member (having a pendulum member pivotably connected to a support member via a hinge arrangement), a housing, and at least one mounting structure configured for clamping the support member to the housing in load bearing contact while concurrently allowing for differential movement between the support member and the housing. Embodiments also include a corresponding housing member for use with a flexure member of an accelerometer, and a flexure member for use with a housing of an accelerometer.

Abstract translation: 一种用于感测沿感测轴线的加速度的加速度计包括挠曲构件（具有通过铰链装置可枢转地连接到支撑构件的摆动构件），壳体和至少一个安装结构，该安装结构构造成用于将支撑构件夹紧到壳体 承载接触同时允许支撑构件和壳体之间的差速运动。 实施例还包括与加速度计的挠曲构件一起使用的相应的壳体构件和用于与加速度计的壳体一起使用的挠曲构件。

公开(公告)号：US09322650B2

公开(公告)日：2016-04-26

申请号：US13661433

申请日：2012-10-26

Applicant: Seiko Epson Corporation

Inventor： Jun Watanabe ,  Kazuyuki Nakasendo

IPC: G01P1/02 ,  G01C9/06 ,  G01P15/09 ,  G01P15/097 ,  G01P15/08

CPC classification number: G01C9/06 ,  G01P15/09 ,  G01P15/097 ,  G01P2015/0828

Abstract: A physical quantity detection device includes: a base portion; a movable portion supported by the base portion via a joint and shifting in accordance with a change of a physical quantity; a physical quantity detection element extending over the base portion and the movable portion; a first support member extending from the base portion and having a first fixing portion; and a second support member extending from the base portion and having a second fixing portion. The distance between the first fixing portion and the second fixing portion is shorter than the distance between the root of the first support member at the junction with the base portion and the root of the second support member at the junction with the base portion.

Abstract translation: 物理量检测装置包括：基部; 可动部，其经由接头被基部支撑，并且根据物理量的变化而移动; 物理量检测元件，其在所述基部和所述可动部上延伸; 第一支撑构件，其从所述基部延伸并具有第一固定部; 以及从所述基部延伸并具有第二固定部的第二支撑构件。 第一固定部分和第二固定部分之间的距离比第一支撑部件的根部与基部的接合处的距离和第二支撑部件的与基部的接合处的根部之间的距离短。

公开(公告)号：US08950259B2

公开(公告)日：2015-02-10

申请号：US13115580

申请日：2011-05-25

Applicant: Shigekazu Takagi

Inventor： Shigekazu Takagi

IPC: G01P15/125 ,  G01P15/18 ,  G01C19/5783 ,  G01P15/08

CPC classification number: G01P15/18 ,  G01C19/5783 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0828 ,  G01P2015/0845 ,  G01P2015/0865

Abstract: The manufacturing of an element structure including two or more sensor element is to be facilitated. An element structure includes a first substrate including a first support layer and a first sensor element disposed on the first support layer and a second substrate including a second support layer and a second sensor element disposed on the second support layer, wherein the second substrate is disposed on the first substrate via a spacer member in a state in which the first sensor element and the second sensor element are disposed to face each other.

Abstract translation: 促进包括两个或更多个传感器元件的元件结构的制造。 元件结构包括第一衬底，其包括第一支撑层和设置在第一支撑层上的第一传感器元件，以及第二衬底，其包括第二支撑层和设置在第二支撑层上的第二传感器元件，其中第二衬底被布置 在第一传感器元件和第二传感器元件彼此相对配置的状态下经由间隔件在第一基板上。

公开(公告)号：US20150000403A1

公开(公告)日：2015-01-01

申请号：US14317575

申请日：2014-06-27

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Matti LIUKKU ,  Ville-Pekka RYTKÖNEN ,  Anssi BLOMQVIST

IPC: G01P15/18

CPC classification number: G01P15/18 ,  G01P15/00 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0828 ,  G01P2015/0837

Abstract: The invention relates to a capacitive micromechanical acceleration sensor comprising a first sensor, a second sensor, and a third sensor. The first sensor comprises a rotor electrode and stator electrode. The sensor comprises a first beam that is connected to a rotor electrode support structure and that is connected to the rotor electrode. The sensor comprises a second beam that is connected to the rotor electrode support structure and that is connected to the rotor electrode. The second sensor is situated in a first space circumscribed by the first beam, the first sensor, and the rotor electrode support structure. The third sensor is situated in a second space circumscribed by the second beam, the first sensor, and the rotor electrode support structure.

Abstract translation: 本发明涉及包括第一传感器，第二传感器和第三传感器的电容微机械加速度传感器。 第一传感器包括转子电极和定子电极。 传感器包括连接到转子电极支撑结构并连接到转子电极的第一梁。 传感器包括连接到转子电极支撑结构并连接到转子电极的第二梁。 第二传感器位于由第一光束，第一传感器和转子电极支撑结构外接的第一空间中。 第三传感器位于由第二光束，第一传感器和转子电极支撑结构外接的第二空间中。

公开(公告)号：US08919200B2

公开(公告)日：2014-12-30

申请号：US13664710

申请日：2012-10-31

Applicant: Seiko Epson Corporation

Inventor： Jun Watanabe

IPC: G01P15/00 ,  G01P15/097 ,  G01P15/08

CPC classification number: G01P15/097 ,  G01P2015/0828

Abstract: A physical quantity detection device includes: a base; a movable portion, provided in the base through a coupling portion, which is displaced in accordance with a change in a physical quantity; a physical quantity detection element which is fixed across the base and the movable portion; and a mass portion which is fixed to the movable portion, wherein the movable portion includes a first fixing portion to which the physical quantity detection element is fixed, a second fixing portion to which the mass portion is fixed, and a notch having a notched shape which is separated from the coupling portion, and reaches from a lateral side of the movable portion to a place intersecting a line that links the first fixing portion to the second fixing portion.

Abstract translation: 物理量检测装置包括：基座; 可移动部分，其通过联接部分设置在基座中，该联接部分根据物理量的变化而移位; 物理量检测元件，其固定在基部和可动部分上; 以及固定在所述可动部的质量部，所述可动部包括物理量检测要素被固定的第一固定部，所述质量部固定的第二固定部，以及具有切口形状的切口 其从耦合部分分离，并且从可动部分的横向侧到达与将第一固定部分连接到第二固定部分的线相交的位置。

公开(公告)号：US20140230520A1

公开(公告)日：2014-08-21

申请号：US13771792

申请日：2013-02-20

Applicant: Michael D. BULATOWICZ

Inventor： Michael D. BULATOWICZ

IPC: G01P21/00 ,  G06F17/10

CPC classification number: G01P21/00 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0828 ,  G06F17/10

Abstract: One embodiment of the invention includes an accelerometer sensor system. The system includes a sensor comprising a proofmass and electrodes and being configured to generate acceleration feedback signals based on control signals applied to the electrodes in response to an input acceleration. The system also includes an acceleration component configured to measure the input acceleration based on the acceleration feedback signals. The system further includes an acceleration controller configured to generate the control signals to define a first scale-factor range associated with the sensor and to define a second scale-factor range associated with the sensor. The control system includes a calibration component configured to calibrate the accelerometer sensor system with respect to range-dependent bias error based on a difference between the measured input acceleration at each of the first scale-factor range and the second scale-factor range.

Abstract translation: 本发明的一个实施例包括加速度传感器系统。 该系统包括传感器，其包括校样和电极，并被配置为基于响应于输入加速度施加到电极的控制信号产生加速度反馈信号。 该系统还包括加速度分量，其被配置为基于加速度反馈信号来测量输入加速度。 该系统还包括加速度控制器，其被配置为产生控制信号以限定与传感器相关联的第一比例因子范围并且定义与传感器相关联的第二比例因子范围。 控制系统包括校准组件，其被配置为基于在第一比例因子范围和第二比例因子范围中的每个测量的输入加速度之间的差异来相对于基于范围的偏置误差校准加速度计传感器系统。