公开(公告)号：US20180242092A1

公开(公告)日：2018-08-23

申请号：US15772580

申请日：2015-11-03

Applicant: Goertek Inc.

Inventor： Quanbo Zou ,  Zhe Wang ,  Yan Loke

IPC: H04R31/00 ,  H04R19/04

CPC classification number: H04R31/003 ,  B81B2201/0257 ,  H04R19/04 ,  H04R31/00 ,  H04R2201/003

Abstract: A MEMS microphone chip trimming method, apparatus, manufacturing method and microphone are disclosed herein. The method for trimming MEMS microphone chips comprises: detecting a pull-in voltage distribution of MEMS microphone chips on a wafer; providing a mask based on the pull-in voltage distribution; and trimming the MEMS microphone chips on the wafer by using the mask.