MULTI-BLOCK SPUTTERING TARGET WITH INTERFACE PORTIONS AND ASSOCIATED METHODS AND ARTICLES
    1.
    发明申请
    MULTI-BLOCK SPUTTERING TARGET WITH INTERFACE PORTIONS AND ASSOCIATED METHODS AND ARTICLES 有权
    具有接口部分和相关方法和文章的多块式飞溅目标

    公开(公告)号:US20130299347A1

    公开(公告)日:2013-11-14

    申请号:US13793043

    申请日:2013-03-11

    Abstract: A sputtering target that includes at least two consolidated blocks, each block including an alloy including a first metal (e.g., a refractory metal such as molybdenum in an amount greater than about 30 percent by weight) and at least one additional alloying ingredient; and a joint between the at least two consolidated blocks, the joint being prepared free of any microstructure derived from a diffusion bond of an added loose powder. A process for making the target includes hot isostatically pressing (e.g., below a temperature of 1080° C.), consolidated preform blocks that, prior to pressing, have interposed between the consolidated powder metal blocks at least one continuous solid interface portion. The at least one continuous solid interface portion may include a cold spray body, which may be a mass of cold spray deposited powders on a surface a block, a sintered preform, a compacted powder body (e.g., a tile), or any combination thereof.

    Abstract translation: 包括至少两个固结块的溅射靶,每个块包括包含第一金属(例如,大于约30重量%的量的诸如钼的难熔金属)和至少一种另外的合金成分的合金; 以及所述至少两个固结块之间的接头,所述接头被制备成没有衍生自所添加的松散粉末的扩散接合的任何微结构。 用于制造目标的方法包括热等静压(例如,低于1080℃的温度),固化的预成型块,其在压制之前已经在固化的粉末金属块之间插入至少一个连续的固体界面部分。 所述至少一个连续的固体界面部分可以包括冷喷雾体,其可以是在块的表面上的大量冷喷雾沉积的粉末,烧结的预成型体,压实的粉末体(例如,瓷砖)或其任何组合 。

    Multi-block sputtering target with interface portions and associated methods and articles
    3.
    发明授权
    Multi-block sputtering target with interface portions and associated methods and articles 有权
    具有界面部分和相关方法和制品的多块溅射靶

    公开(公告)号:US09334565B2

    公开(公告)日:2016-05-10

    申请号:US13793043

    申请日:2013-03-11

    Abstract: A sputtering target that includes at least two consolidated blocks, each block including an alloy including a first metal (e.g., a refractory metal such as molybdenum in an amount greater than about 30 percent by weight) and at least one additional alloying ingredient; and a joint between the at least two consolidated blocks, the joint being prepared free of any microstructure derived from a diffusion bond of an added loose powder. A process for making the target includes hot isostatically pressing (e.g., below a temperature of 1080° C.), consolidated preform blocks that, prior to pressing, have interposed between the consolidated powder metal blocks at least one continuous solid interface portion. The at least one continuous solid interface portion may include a cold spray body, which may be a mass of cold spray deposited powders on a surface a block, a sintered preform, a compacted powder body (e.g., a tile), or any combination thereof.

    Abstract translation: 包括至少两个固结块的溅射靶,每个块包括包含第一金属(例如,大于约30重量%的量的诸如钼的难熔金属)和至少一种另外的合金成分的合金; 以及所述至少两个固结块之间的接头,所述接头被制备成没有衍生自所添加的松散粉末的扩散接合的任何微结构。 用于制造目标的方法包括热等静压(例如,低于1080℃的温度),固化的预成型块,其在压制之前已经在固化的粉末金属块之间插入至少一个连续的固体界面部分。 所述至少一个连续的固体界面部分可以包括冷喷雾体,其可以是在块的表面上的大量冷喷雾沉积的粉末,烧结的预成型体,压实的粉末体(例如,瓷砖)或其任何组合 。

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