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公开(公告)号：US10712363B2
公开(公告)日：2020-07-14
申请号：US16257226
申请日：2019-01-25
摘要： Provided is a scanning probe microscope with which measurement data and a distribution image of differential data of the measurement data can be displayed selectively or together, an edge enhancement image can be obtained, and user convenience is improved. A scanning probe microscope (200) includes: a distribution image calculator (40a) configured to calculate a one-dimensional or two-dimensional first distribution image (201) of measurement data, and a one-dimensional or two-dimensional second distribution image (202) of differential data of adjacent data elements of the measurement data; and a display controller (40b) configured to instruct the distribution image calculator to calculate at least one of the first distribution image or the second distribution image, and to display the calculated distribution image on a predetermined display.
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公开(公告)号：US20190234992A1
公开(公告)日：2019-08-01
申请号：US16257226
申请日：2019-01-25
摘要： Provided is a scanning probe microscope with which measurement data and a distribution image of differential data of the measurement data can be displayed selectively or together, an edge enhancement image can be obtained, and user convenience is improved. A scanning probe microscope (200) includes: a distribution image calculator (40a) configured to calculate a one-dimensional or two-dimensional first distribution image (201) of measurement data, and a one-dimensional or two-dimensional second distribution image (202) of differential data of adjacent data elements of the measurement data; and a display controller (40b) configured to instruct the distribution image calculator to calculate at least one of the first distribution image or the second distribution image, and to display the calculated distribution image on a predetermined display.
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3.发明授权公开(公告)号：US09921241B2
公开(公告)日：2018-03-20
申请号：US15086560
申请日：2016-03-31
IPC分类号： G01Q30/06
CPC分类号： G01Q30/06
摘要： A scanning probe microscope has a cantilever having: a probe that is to be contacted or approached on a surface of a sample; and a processor that operates to perform a process including: calculating a measurement width MW and an offset value OV from a minimum value Smin and a maximum value Smax of a signal indicating a displacement of the cantilever with the following Equations (1) and (2) when a prescanning operation is performed before the measurement data is acquired by the probe microscope controller; and adjusting at least one of the offset value OV and the measurement width MW based on a temporal variation of the signal at the same position on the surface of the sample when the prescanning operation is performed. MW=(Smax−Smin) Equation (1) OV=(MW/2)+Smin Equation (2)
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4.发明申请Scanning Probe Microscope and Measurement Range Adjusting Method for Scanning Probe Microscope 有权扫描探针显微镜和扫描探针显微镜的测量范围调整方法公开(公告)号：US20160291053A1
公开(公告)日：2016-10-06
申请号：US15086560
申请日：2016-03-31
IPC分类号： G01Q30/06
CPC分类号： G01Q30/06
摘要： A scanning probe microscope has a cantilever having: a probe that is to be contacted or approached on a surface of a sample; and a processor that operates to perform a process including: calculating a measurement width MW and an offset value OV from a minimum value Smin and a maximum value Smax of a signal indicating a displacement of the cantilever with the following Equations (1) and (2) when a prescanning operation is performed before the measurement data is acquired by the probe microscope controller; and adjusting at least one of the offset value OV and the measurement width MW based on a temporal variation of the signal at the same position on the surface of the sample when the prescanning operation is performed. MW=(Smax−Smin) Equation (1) OV=(MW/2)+Smin Equation (2)
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公开(公告)号：US09354248B2
公开(公告)日：2016-05-31
申请号：US14673372
申请日：2015-03-30
摘要： A method for measuring vibration characteristic of a cantilever is proposed in this disclosure. The method includes: measuring vibration amplitude V of a cantilever installed in a scanning probe microscope when vibration with a resonant frequency f1 (Hz) is applied to the cantilever; obtaining a time Th (second) when the vibration amplitude V is equal to or more than 0.90 of a stationary amplitude V0; and calculating a Q value by using the following Expression: Q value=f1×Th.
摘要翻译： 本公开提出了一种用于测量悬臂的振动特性的方法。 该方法包括：当将谐振频率为f1（Hz）的振动施加到悬臂时，测量安装在扫描探针显微镜中的悬臂的振幅V; 当振动幅度V等于或大于稳定振幅V0的0.90时获得时间Th（秒）; 并使用以下表达式计算Q值：Q value = f1×Th。
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