摘要:
An image creation method of creating a filter image for removing a pseudo defect to inspect presence/absence of a defect on a substrate includes a filter image creation step of creating the filter image by replacing a picture element value of any one of picture elements located on a circumference of a circle about a center position of a registered image with a maximum value of picture element values of a plurality of picture elements selected from among the picture elements located on the circumference.
摘要:
In one embodiment, a substrate inspection apparatus performs, in its maintenance mode, operations including: guiding a light emitted from an illuminating unit to an imaging device via a light-guiding member disposed in a casing; judging whether or not a level of a brightness signal obtained by the imaging device falls within a predetermined allowable range when a light emitted from the illuminating unit falls on the imaging device via the light-guiding member; and alarming, if it is judged that the value of the brightness signal is out of the predetermined allowable range, that replacement of the illuminating unit is required.
摘要:
An image creation method of creating a filter image for removing a pseudo defect to inspect presence/absence of a defect on a substrate includes a filter image creation step of creating the filter image by replacing a picture element value of any one of picture elements located on a circumference of a circle about a center position of a registered image with a maximum value of picture element values of a plurality of picture elements selected from among the picture elements located on the circumference.
摘要:
In one embodiment, a substrate inspection apparatus performs, in its maintenance mode, operations including: guiding a light emitted from an illuminating unit to an imaging device via a light-guiding member disposed in a casing; judging whether or not a level of a brightness signal obtained by the imaging device falls within a predetermined allowable range when a light emitted from the illuminating unit falls on the imaging device via the light-guiding member; and alarming, if it is judged that the value of the brightness signal is out of the predetermined allowable range, that replacement of the illuminating unit is required.
摘要:
The present invention includes an illuminance adjustment step of setting an optimum illuminance of the illumination; and a defect inspection step of picking up the image of the substrate illuminated with the illumination at the optimum illuminance, wherein the illuminance adjustment step has: a first step of applying illuminations at different illuminances to a plurality of measurement regions on a front surface of the substrate and picking up an image of each of the measurement regions, while moving the substrate; a second step of making a luminance of the picked up image of each of the measurement regions into a histogram to find a reference luminance where an integral value from a maximum luminance side of the histogram is a predetermined value; and a third step of calculating a correlation between each of the reference luminances and the illuminance, and setting based on the correlation an illuminance at which the reference luminance coincides with a predetermined luminance, as the optimum illuminance.
摘要:
Flow guides forming an inlet channel are formed on a surface of a metal separator of a fuel cell. The flow guides overlap a section of an outer seal provided on the other surface of the metal separator. When a load is applied to the flow guides and the overlapping section in a stacking direction of the fuel cell, the flow guides and the overlapping section are deformed substantially equally in the stacking direction to the same extent. The line pressure of the flow guides and the line pressure of the overlapping section are substantially the same. The seal length L1 of the flow guides and the seal length L2 of the overlapping section are substantially the same.
摘要:
A fuel cell stack including a plurality of fuel cells each formed by stacking separators and an electrolyte membrane-electrode assembly. The electrolyte membrane-electrode assembly includes an electrolyte membrane provided with a pair of electrodes on the opposite sides thereof. A stacked body formed by stacking the fuel cells is provided with a pair of end plates at the opposite ends thereof in a stacking direction. The end plates are integrally fixed by fastening members with the distance between the end plates maintained. A load measurement mechanism including a plurality of load sensors integrally connected to a connector member is provided between one of the end plates and the stacked body. The one of the end plates is provided with a pressure mechanism. The pressure mechanism presses the load measurement mechanism toward the stacked body to thereby apply a tightening load to the stacked body via the load sensors.
摘要:
A power generation cell includes a membrane electrode assembly and first and second metal separators sandwiching the membrane electrode assembly. Ridge members are formed integrally on the second metal separator, and these ridge members contact a first seal member of the first metal separator under pressure to form an inlet connection channel and an outlet connection channel. The coolant supply passage and the coolant flow field are connected through the inlet connection channel and the coolant discharge passage and the coolant flow field are connected through the outlet connection channel.
摘要:
An injection-molding method made up of a step of preparing a first die (41), a second die (46) and a third die (47), a step of sandwiching a separator proper (16) with the first die (41) and the second die (46), a step of molding a front side molded layer (32) by injecting silicone rubber (59) into the front side cavity (50) through a gate (52), a step of replacing the second die (46) with a third die (47) while the front side molded layer (32) is still soft, and a step of molding a rear side molded layer (34) by piercing the front side molded layer (32) with an injection pressure injecting the silicone rubber (59) through the gate (52) and filling a rear side cavity (63) with silicone rubber (59) through the through hole (30).
摘要:
A fuel cell stack capable of giving improved impact resistance and vibration resistance without causing the space occupied by the fuel cell stack to be increased. In a fuel cell stack for mounting in a vehicle in which a plurality of fuel cell units, each of which is formed by interposing a solid polymer electrolyte membrane between an anode electrode and a cathode electrode, are stacked in a horizontal direction with separators placed between each, mounting members used for installation are provided at backup plates that are outside fastening structure portions that are provided at both ends along the direction in which the fuel cell units are stacked, and an intermediate supporting member used for installation is additionally provided at an intermediate portion along the direction in which the fuel cell units are stacked.