公开(公告)号：US10541103B2

公开(公告)日：2020-01-21

申请号：US15533517

申请日：2014-12-10

申请人： Hitachi High-Technologies Corporation

发明人： Yuzuru Mizuhara ,  Toshiyuki Yokosuka ,  Hideyuki Kazumi ,  Kouichi Kurosawa ,  Kenichi Myochin

IPC分类号： H01J37/12 ,  H01J37/244 ,  H01J37/28 ,  H01J37/05

摘要： The purpose of the present invention is to reduce the amount of charged particles that are lost by colliding with the interior of a column of a charged particle beam device, and detect charged particles with high efficiency. To achieve this purpose, proposed is a charged particle beam device provided with: an objective lens that focuses a charged particle beam; a detector that is disposed between the objective lens and a charged particle source; a deflector that deflects charged particles emitted from a sample such that the charged particles separate from the axis of the charged particle beam; and a plurality of electrodes that are disposed between the deflector and the objective lens and that form a plurality of electrostatic lenses for focusing the charged particles emitted from the sample on a deflection point of the deflector.