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公开(公告)号：US3303399A
公开(公告)日：1967-02-07
申请号：US34121264
申请日：1964-01-30
Applicant: IBM
Inventor： HOOGENDOORN HELEN M , SEYMOUR MERRIN
CPC classification number: H01L21/316 , C03C3/072 , C03C3/102 , C03C3/108 , C03C4/00 , H01L23/291 , H01L2924/0002 , Y10S148/043 , Y10S148/118 , H01L2924/00
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