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公开(公告)号:US3248256A
公开(公告)日:1966-04-26
申请号:US21266462
申请日:1962-07-26
Applicant: IBM
Inventor: YOSHIRO BUDO , CASWELL HOLLIS L , PRIEST JOSEPH R
IPC: C23C14/00
CPC classification number: C23C14/0021 , Y10S438/944
公开(公告)号:US3248256A
公开(公告)日:1966-04-26
申请号:US21266462
申请日:1962-07-26
Applicant: IBM
Inventor: YOSHIRO BUDO , CASWELL HOLLIS L , PRIEST JOSEPH R
IPC: C23C14/00
CPC classification number: C23C14/0021 , Y10S438/944