公开(公告)号：US12125861B2

公开(公告)日：2024-10-22

申请号：US17177190

申请日：2021-02-16

Applicant: IMEC VZW

Inventor： Nick Spooren ,  Bert Geelen

IPC: H01L27/146

CPC classification number: H01L27/14621 ,  H01L27/14623 ,  H01L27/14627 ,  H01L27/14643

Abstract: The present invention relates to a spectral sensor. The spectral sensor comprising: a light detecting element; a microlens; and an interference filter arranged between the light detecting element and the microlens, and configured to transmit light in one or more spectral bands; wherein the microlens has an effective focal length (F) exceeding a distance (D) between the microlens and the light detecting element. The microlens may be configured such that light refracted by the microlens, to be transmitted through the interference filter, converges towards a position (P) behind the light detecting element. The present invention further relates to an image sensor comprising a plurality of spectral sensors.

公开(公告)号：US11408769B2

公开(公告)日：2022-08-09

申请号：US16592228

申请日：2019-10-03

Applicant: IMEC VZW

Inventor： Nicolaas Tack ,  Nick Spooren ,  Bart Vereecke

IPC: G01J3/28 ,  G01J3/36

Abstract: A spectral sensor comprises (i) a first type of interference filter comprising reflective multilayers of a first type and an intermediate layer configured to give a constructive interference for a wavelength in a first range, and (ii) a second type of interference filter comprising reflective multilayers of a second type and an intermediate layer configured to give a constructive interference for a wavelength in a second range. The sensor further comprises first and second filter stacks configured to selectively transmit light in the first and second wavelength ranges to first and second photo-sensitive areas, respectively. The first filter stack includes the first type of interference filter and a second type of dielectric mirror that is reflective in the second wavelength range. The second filter stack includes the second type of interference filter and a first type of dielectric mirror that is reflective in the first wavelength range.