公开(公告)号：US20240153788A1

公开(公告)日：2024-05-09

申请号：US18360771

申请日：2023-07-27

Applicant: Industrial Technology Research Institute

Inventor： Jia-Cheng Sun ,  Jui-Hsiang Cheng ,  I-Ling Nien ,  Chia-Yen Kuo ,  Shou-Nan Li

IPC: H01L21/67

CPC classification number: H01L21/67017 ,  H01L21/67253

Abstract: An addition system of a reducing agent in a semiconductor manufacturing process includes pre-treatment and post-treatment gas concentration detection devices, a process exhaust gas treatment device, a reducing agent supply device, and an addition system control device. The process exhaust gas treatment device purifies exhaust gas of a semiconductor manufacturing process and emits a post-treatment gas. The reducing agent supply device supplies a reducing agent gas into the process exhaust gas treatment device. The post-treatment gas concentration detection device detects a residual concentration of the reducing agent gas in the post-treatment gas. The addition system control device calculates destruction and removal efficiency (DRE) for process gases according to pre-treatment and post-treatment gas concentrations, and, according to the DRE and the residual concentration, sends a signal to the reducing agent supply device to control the amount of the reducing agent gas added.

公开(公告)号：US10782669B2

公开(公告)日：2020-09-22

申请号：US16225876

申请日：2018-12-19

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Jia-Cheng Sun ,  Chen-Hui Kuo ,  Chi-Cheng Lin ,  Chen-Yu Kai

IPC: G05B19/401 ,  G05B19/18 ,  G05B19/4097

Abstract: A machining parameter adjustment system is established in a controller. The controller is connected to a machine. The controller is configured to receive a machining program and analyze at least one process included in the machining program. Also, the controller sets a tuning program corresponding to the process and inserts the tuning program before or after the code of the process, so as to generate an integration program and upload the integration program to the machine.

公开(公告)号：US11841690B2

公开(公告)日：2023-12-12

申请号：US17170312

申请日：2021-02-08

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Jia-Cheng Sun ,  Ci-Rong Huang ,  Yang-Lun Liu ,  Chen-Yu Kai

IPC: G05B17/02 ,  G06F30/20 ,  G06F30/10 ,  G06F111/10

CPC classification number: G05B17/02 ,  G06F30/10 ,  G06F30/20 ,  G06F2111/10

Abstract: A processing method for automatically generating machining features is provided. A workpiece CAD file is obtained to perform a CAD numerical analysis on a blank body. With the workpiece CAD file being used as a target, a workpiece CAD appearance is compared with the blank body to obtain a feature identification result of a first to-be-processed blank body, which includes identifying data of a to-be-removed blank body and a feature of a first processing surface. A geometric analysis is performed on the first processing surface feature and a tool selection range is determined. A virtual cutting simulation is performed on the first processing surface to generate a processed area data and an unprocessed area data. A spatial coordinate mapping comparison between the unprocessed area data and a surface data of the workpiece CAD file is performed to obtain a feature identification result of a second to-be-processed blank body.

公开(公告)号：US11679465B2

公开(公告)日：2023-06-20

申请号：US16823348

申请日：2020-03-19

Applicant: Industrial Technology Research Institute

Inventor： Chen-Hui Kuo ,  Tian-You Hou ,  Jia-Cheng Sun ,  Chen-Yu Kai ,  Yung-Chih Lin

IPC: B23Q17/22 ,  B23Q17/10

CPC classification number: B23Q17/2233 ,  B23Q17/10

Abstract: This disclosure provides a machine tool adjustment method and system thereof. The machine tool adjustment method includes the following steps: enabling a machine tool to perform a circular test; obtaining a measured error value Em from a measuring instrument, and the measured error value Em is defined by the difference between the actual circular trajectory and the preset circular trajectory during the circular test; determining an error condition of the tool machine from the measured error value Em; determining whether the error condition is less than a predetermined criteria; if not, defining a compensation parameter according to the error condition and enabling the machine tool to perform another circular test according to the set compensation parameter until the error condition is less than the predetermined criteria; and if yes, ending the circular test and the machine tool adjustment is finished.

公开(公告)号：US20210237218A1

公开(公告)日：2021-08-05

申请号：US16823348

申请日：2020-03-19

Applicant: Industrial Technology Research Institute

Inventor： Chen-Hui Kuo ,  Tian-You Hou ,  Jia-Cheng Sun ,  Chen-Yu Kai ,  Yung-Chih Lin

IPC: B23Q17/22 ,  B23Q17/10

Abstract: This disclosure provides a machine tool adjustment method and system thereof. The machine tool adjustment method includes the following steps: enabling a machine tool to perform a circular test; obtaining a measured error value Em from a measuring instrument, and the measured error value Em is defined by the difference between the actual circular trajectory and the preset circular trajectory during the circular test; determining an error condition of the tool machine from the measured error value Em; determining whether the error condition is less than a predetermined criteria; if not, defining a compensation parameter according to the error condition and enabling the machine tool to perform another circular test according to the set compensation parameter until the error condition is less than the predetermined criteria; and if yes, ending the circular test and the machine tool adjustment is finished.