公开(公告)号：US20240327249A1

公开(公告)日：2024-10-03

申请号：US18740807

申请日：2024-06-12

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Hsin-Ju Yang ,  Guan-You LIN ,  Wei-Chieh JEN ,  Yi-Tze TSAI

IPC: C02F1/32 ,  C02F101/10 ,  C02F103/34 ,  H01L21/67

CPC classification number: C02F1/325 ,  H01L21/67017 ,  H01L21/67115 ,  C02F2101/10 ,  C02F2103/346 ,  C02F2201/005 ,  C02F2201/3227 ,  C02F2209/02 ,  C02F2209/40

Abstract: A device for recycling sulfuric acid is provided. A container has an inner space. An inlet is located on the first side of the container for introducing a liquid containing sulfuric acid and hydrogen peroxide through a pump. An outlet is located on the second side of the container for exhausting the treated liquid from the container, and the first side and the second side are opposite sides. IR lamp and UV lamp are located in the inner space of the container for making contact with the liquid. IR radiation emitted from the IR lamp and UV radiation emitted from the UV lamp decompose the hydrogen peroxide in the liquid to water and oxygen. The IR radiation heats the liquid to 90° C. to 130° C., and the oxygen is exhausted through the air hole.