公开(公告)号：US20170276720A1

公开(公告)日：2017-09-28

申请号：US15286394

申请日：2016-10-05

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Yao-Chung HSU ,  Sen-Chia CHANG ,  Tsung-Jung HSIEH

IPC: G01R31/26 ,  G08B21/18

CPC classification number: G01R31/2601 ,  G01R31/2642 ,  G08B21/18

Abstract: An abnormality measuring method and an abnormality measuring apparatus of equipment are provided. The abnormality measuring method includes the following steps: acquiring a feature sequence corresponding to a life cycle according to recipe information and sensing information, wherein the feature sequence includes a plurality of feature subset sequences, and the life cycle is relative to a plurality of process runs; performing repeatedly a life segment analyzing process to acquire a plurality of life segments of the life cycle and each of the plurality of the feature subset sequences corresponding to one of the plurality of life segments; building a corresponding trending distribution of each of the plurality of life segments according to a corresponding feature subset sequence of the life segment; and determining whether to send an alarm message according to a plurality of trending distributions.

公开(公告)号：US20180188719A1

公开(公告)日：2018-07-05

申请号：US15498315

申请日：2017-04-26

Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE

Inventor： Hong-Chi KU ,  Tsung-Jung HSIEH ,  Yao-Chung HSU

IPC: G05B23/02 ,  H05B1/02

Abstract: A heater condition monitoring and accessing method includes steps as follows: A plurality of history operating data of a heater under test are acquired, wherein each of the history operating data has a temperature, an operating sequence, and a resistance. A plurality subsets of the history operating data corresponding to a predetermined temperature range are picked up from the history operating data to form a resistance-operating sequence characteristic curve. At least one test is performed according to the resistance-operating sequence characteristic curve to determine whether a fault of the heater under test occurs at the current operating run or at the subsequent operating run and to evaluate the remaining useful life of the heater under test.