公开(公告)号：US11976992B2

公开(公告)日：2024-05-07

申请号：US17761996

申请日：2019-09-20

Applicant: INFICON AG

Inventor： Stefan Kaiser ,  Bernhard Andreaus

IPC: G01L21/34 ,  F16L5/02

CPC classification number: G01L21/34 ,  F16L5/02

Abstract: A vacuum pressure sensor includes a vacuum-tight electrical feedthrough. The feedthrough has an electrically insulating insulator element with a through-opening, having a first boundary surface adjacent to the through-opening and a second boundary surface also adjacent to the through-opening and opposite to the first boundary surface, and an electrically conductive conductor element which extends through the through-opening and which is connected to the insulator element in a vacuum-tight manner along a circumferential line of the conductor element. The insulator element is transmissive to electromagnetic radiation in an optical wavelength range and the first boundary surface and/or the second boundary surface is formed as a curved surface.

公开(公告)号：US12154771B2

公开(公告)日：2024-11-26

申请号：US18431091

申请日：2024-02-02

Applicant: INFICON AG

Inventor： Urs Wälchli ,  Stefan Kaiser ,  Bernhard Andreaus ,  Martin Wüest ,  Astrid Waldner ,  Michael Trefzer

IPC: H01J41/10 ,  G01L21/30 ,  H01J41/02

Abstract: Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1′, 1″) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2′, 2″) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.

公开(公告)号：US12096545B2

公开(公告)日：2024-09-17

申请号：US18285201

申请日：2022-03-21

Applicant: INFICON AG

Inventor： Bernhard Andreaus ,  Astrid Waldner

IPC: H05H1/24 ,  G01L11/02 ,  G01N21/67

CPC classification number: H05H1/2406 ,  G01L11/02 ,  G01N21/67

Abstract: A vacuum feedthrough (10) which is constructed in radial layers comprises the following elements (from inwards to outwards): —a lens element (11), —a first ring (12) made of glass, —a first hollow cylinder (13) made of a first dielectric material, —a first electrically conductive layer (18), —a second hollow cylinder (14) made of glass, —a third hollow cylinder (15) made of ceramic, —a second ring made of glass (16), and—a frame (17) made of metal. On the basis of the vacuum feedthrough, the invention additionally relates to an electrode assembly, to a device for generating a DBD plasma discharge, to a measuring device for characterizing a pressure and/or a gas composition, and to a method for operating the measuring device.

公开(公告)号：US12085467B2

公开(公告)日：2024-09-10

申请号：US17762019

申请日：2019-09-20

Applicant: INFICON AG

Inventor： Carsten Strietzel ,  Urs Wälchli ,  Stefan Kaiser ,  Christian Riesch ,  Bernhard Andreaus ,  Mario Weder

IPC: G01L21/34

CPC classification number: G01L21/34

Abstract: The invention relates to a method 100 for determining a pressure in a vacuum system, wherein the method comprises the steps of:



a) generating 101 a plasma in a sample chamber which is fluid-dynamically connected to the vacuum system and which is in electrical contact with a first electrode and a second electrode;
b) measuring 102 a current intensity of an electrical current flowing through the plasma between the first electrode and the second electrode;
c) measuring 103 a first radiation intensity of electromagnetic radiation of a first wavelength range which is emitted from the plasma, wherein the first wavelength range contains at least a first emission line of a first plasma species of a first chemical element;
d) measuring 104 a second radiation intensity of electromagnetic radiation of a second wavelength range which is emitted from the plasma, wherein the second wavelength range contains a second emission line of the first plasma species of the first chemical element or of a second plasma species of the first chemical element, and wherein the second emission line is outside the first wavelength range; and
e) determining 105 the pressure in the vacuum system as a function of the measured current intensity, the measured first radiation intensity, and the measured second radiation intensity. Further, the invention relates to a vacuum pressure sensor.