公开(公告)号：US20150338645A1

公开(公告)日：2015-11-26

申请号：US14654465

申请日：2012-12-20

Applicant: Intel Corporation

Inventor： JULIEN GAMET ,  FAOUZI KHECHANA

IPC: G02B26/10 ,  G02B7/00 ,  G02B26/08

CPC classification number: G02B26/101 ,  G02B7/008 ,  G02B26/085

Abstract: A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.

Abstract translation: 一种MEMS微镜装置，包括MEMS微镜，支撑结构以及第一和第二扭转臂，每个将所述MEMS微镜连接到所述支撑结构，其中所述第一和第二扭转臂被布置成限定 第一振荡轴，MEMS微镜可绕其摆动; 用于围绕第一振荡轴线振荡MEMS微镜的单个致动线圈，单个致动线圈的至少一部分被布置成与MEMS微反射镜协作; 所述磁体被布置成使得由所述磁体产生的磁场至少淹没所述单个致动线圈的与所述MEMS微反射镜协作的部分; 其中所述单个致动线圈被构造成沿着所述第一和第二扭转臂延伸。

公开(公告)号：US20180081167A1

公开(公告)日：2018-03-22

申请号：US15480304

申请日：2017-04-05

Applicant: INTEL CORPORATION

Inventor： JULIEN GAMET ,  FAOUZI KHECHANA

IPC: G02B26/10 ,  G02B26/08 ,  G02B7/00

CPC classification number: G02B26/101 ,  G02B7/008 ,  G02B26/085

Abstract: A MEMS micro-mirror device comprising, a MEMS micro-mirror, a support structure and, a first and second torsional arm which each connect the MEMS micro-mirror to the support structure, wherein the first and second torsional arms are arranged to define a first oscillation axis about which the MEMS micro-mirror can oscillate; a single actuation coil for oscillating the MEMS micro mirror about the first oscillation axis, at least a portion of the single actuation coil being arranged to cooperate with the MEMS micro mirror; a magnet which is arranged such that a magnetic field generated by the magnet submerges at least the portion of the single actuation coil which cooperates with the MEMS micro mirror; wherein the single actuation coil is configured to extend along the first and second torsional arms.