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公开(公告)号:US10026829B2
公开(公告)日:2018-07-17
申请号:US15434981
申请日:2017-02-16
Applicant: Intel Corporation
Inventor: Annalisa Cappellani , Stephen M. Cea , Tahir Ghani , Harry Gomez , Jack T. Kavalieros , Patrick H. Keys , Seiyon Kim , Kelin J. Kuhn , Aaron D. Lilak , Rafael Rios , Mayank Sahni
IPC: H01L29/66 , H01L29/78 , H01L21/762 , H01L29/06 , H01L29/775 , H01L27/12 , B82Y10/00 , H01L29/423
Abstract: Semiconductor devices with isolated body portions are described. For example, a semiconductor structure includes a semiconductor body disposed above a semiconductor substrate. The semiconductor body includes a channel region and a pair of source and drain regions on either side of the channel region. An isolation pedestal is disposed between the semiconductor body and the semiconductor substrate. A gate electrode stack at least partially surrounds a portion of the channel region of the semiconductor body.