公开(公告)号：US06252759B1

公开(公告)日：2001-06-26

申请号：US08404054

申请日：1995-03-14

申请人： Jürgen Lange ,  Norbert Gill

发明人： Jürgen Lange ,  Norbert Gill

IPC分类号： H01G700

CPC分类号： G01L9/0075

摘要： In order to avoid short-circuits between the electrodes, the pressure sensor comprises: a substrate (11) made of ceramic material, on one surface of which an electrode (13) and a glass layer (14) formed from an original glass frit are disposed; a diaphragm (12) made of ceramic material, which is permanently joined and pressure-sealed to the substrate by means of the original glass frit acting as a spacer (17) holding the diaphragm and the substrate from each other to form a cavity (16), and which on the cavity side is provided with an electrode (15); and leads (18, 19) which extend inwards and/or through the diaphragm (12) to the electrodes (13, 15) in the region of the spacer (17). The differential pressure sensor is formed in a mirror-inverted arrangement in relation to the centre plane of the substrate, so that it carries two pressure sensors. These are pressure-linked by a hole (41) filled with oil and connecting the two cavities and leading through the substrate and outwards. In a further development, thin insulating layers (20; 40, 40′) made of the material of the ceramic of the substrate or of a high-temperature glass can be fixed on the glass layer(s), respectively.

摘要翻译： 为了避免电极之间的短路，压力传感器包括：由陶瓷材料制成的基板（11），其一面由原始玻璃料形成的电极（13）和玻璃层（14） 处置 由陶瓷材料制成的隔膜（12），其通过用作将隔膜和基板彼此保持以形成空腔的间隔件（17）永久地接合并压力密封到基板上 ），并且在空腔侧设置有电极（15）; 以及在间隔件（17）的区域中向内延伸和/或通过隔膜（12）延伸到电极（13,15）的引线（18,19）。 差压传感器相对于基板的中心平面以镜反转的方式形成，从而它承载两个压力传感器。 这些通过填充有油的孔（41）压力连接并连接两个空腔并向外引导通过基板。 在进一步的发展中，可以分别在玻璃层上固定由基板或高温玻璃的陶瓷材料制成的薄绝缘层（20; 40,40'）。

公开(公告)号：US5551303A

公开(公告)日：1996-09-03

申请号：US349608

申请日：1994-12-05

申请人： Arno Donner ,  Norbert Gill ,  Jurgen Lange ,  Volker Schrobel ,  Rolf Schade

发明人： Arno Donner ,  Norbert Gill ,  Jurgen Lange ,  Volker Schrobel ,  Rolf Schade

IPC分类号： G01L9/04 ,  G01L9/00 ,  G01L19/00 ,  H05K9/00

CPC分类号： G01L19/143 ,  G01L19/0084 ,  G01L19/0645 ,  G01L19/148 ,  G01L9/0051

摘要： To ensure insensitivity to electromagnetic interference and to charge influences from the oil fill and achieve good long-term stability, this pressure-measuring arrangement comprises: a pressure sensor having a base and an associated diaphragm with strain gages deposited thereon; a header of insulating material with leads and with an oil filler neck, said header of insulating material having the base mounted thereon, and said leads making electrical contacts to the strain gages; a metal body having a first central recess in a first cross-sectional surface, a second central recess in a second cross-sectional surface facing away from the first cross-sectional surface, and a hole connecting the first recess with the second recess, said first cross-sectional surface being tightly joined at its edge to the header of insulating material, and said first recess accommodating the substrate and diaphragm without touching them; an electrically conductive foil having an opening, said foil being disposed in the first recess as close as possible to, and covering but not touching, the strain gages and connected to ground; a metallic separating diaphragm fitted in the second recess and closing the latter at its edge; and an oil fill in the recesses and in the hole.

摘要翻译： 为了确保对电磁干扰的不敏感和对填充油的影响并且实现良好的长期稳定性，该压力测量装置包括：压力传感器，其具有沉积在其上的应变计的基座和相关联的隔膜; 具有导线和带有填充油口的绝缘材料的头部，所述绝缘材料的头部安装有基座，所述引线与应变计电接触; 金属体，其具有在第一横截面中的第一中心凹部，在远离第一横截面的第二横截面中的第二中心凹部，以及将第一凹部与第二凹部连接的孔， 第一横截面在其边缘处紧密地连接到绝缘材料的头部，并且所述第一凹部容纳衬底和隔膜而不接触它们; 具有开口的导电箔，所述箔设置在所述第一凹部中尽可能靠近并覆盖而不接触所述应变计并连接到地; 金属分离膜，其装配在第二凹部中并在其边缘封闭; 并在油槽中填充油。

公开(公告)号：US20120137784A1

公开(公告)日：2012-06-07

申请号：US13389855

申请日：2010-07-21

申请人： Olaf Krusemark ,  Norbert Gill

发明人： Olaf Krusemark ,  Norbert Gill

IPC分类号： G01L9/12 ,  G01L9/06 ,  G01L9/00

CPC分类号： G01L19/148 ,  G01L19/0645 ,  G01L19/0654 ,  G01L19/141 ,  G01L19/146

摘要： A relative pressure sensor includes: a pressure measuring transducer having a measuring membrane of a semiconductor chip and a platform, wherein, between both of these, a reference pressure chamber is formed; a support body, connected with the platform by means of a pressure-bearing adhesion, wherein a reference pressure path extends through the two former elements into the reference pressure chamber; and a sensor outer body, in which a transducer chamber with a first opening and a second opening is formed. The pressure measuring transducer is brought into the transducer chamber through the first opening, and is held therein by means of the support body. The support body pressure-tightly seals the first opening, and a side of the measuring membrane facing away from the reference pressure chamber is contactable with the media pressure through the second opening. The reference pressure path has a gas-filled, sealed section, which extends from the reference pressure chamber at least through the pressure bearing adhesion, and wherein the sealed section is gas-tightly sealed by means of a flexible, metallized plastic foil.

摘要翻译： 相对压力传感器包括：具有半导体芯片的测量膜和平台的压力测量传感器，其中，在这两者之间形成基准压力室; 支撑体，其通过承压粘合与平台连接，其中参考压力路径延伸穿过两个前述元件进入参考压力室; 以及传感器外壳，其中形成有具有第一开口和第二开口的换能器室。 压力测量传感器通过第一开口进入传感器室，并通过支撑体保持在其中。 支撑体对第一开口进行压力密封，并且测量膜的背离参考压力室的一侧可通过第二开口与介质压力相接触。 参考压力路径具有气体填充的密封部分，其从参考压力室至少通过压力承载粘合力延伸，并且其中密封部分通过柔性金属化塑料箔气密密封。

公开(公告)号：US08770032B2

公开(公告)日：2014-07-08

申请号：US13389855

申请日：2010-07-21

申请人： Olaf Krusemark ,  Norbert Gill

发明人： Olaf Krusemark ,  Norbert Gill

IPC分类号： G01L7/00 ,  G01L19/06 ,  G01L19/14

CPC分类号： G01L19/148 ,  G01L19/0645 ,  G01L19/0654 ,  G01L19/141 ,  G01L19/146

摘要： A relative pressure sensor includes: a pressure measuring transducer having a measuring membrane of a semiconductor chip and a platform, wherein, between both of these, a reference pressure chamber is formed; a support body, connected with the platform by means of a pressure-bearing adhesion, wherein a reference pressure path extends through the two former elements into the reference pressure chamber; and a sensor outer body, in which a transducer chamber with a first opening and a second opening is formed. The pressure measuring transducer is brought into the transducer chamber through the first opening, and is held therein by means of the support body. The support body pressure-tightly seals the first opening, and a side of the measuring membrane facing away from the reference pressure chamber is contactable with the media pressure through the second opening. The reference pressure path has a gas-filled, sealed section, which extends from the reference pressure chamber at least through the pressure bearing adhesion, and wherein the sealed section is gas-tightly sealed by means of a flexible, metallized plastic foil.

摘要翻译： 相对压力传感器包括：具有半导体芯片的测量膜和平台的压力测量传感器，其中，在这两者之间形成基准压力室; 支撑体，其通过承压粘合与平台连接，其中参考压力路径延伸穿过两个前述元件进入参考压力室; 以及传感器外壳，其中形成有具有第一开口和第二开口的换能器室。 压力测量传感器通过第一开口进入传感器室，并通过支撑体保持在其中。 支撑体对第一开口进行压力密封，并且测量膜的背离参考压力室的一侧可通过第二开口与介质压力相接触。 参考压力路径具有气体填充的密封部分，其从参考压力室至少通过压力承载粘合力延伸，并且其中密封部分通过柔性金属化塑料箔气密密封。