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公开(公告)号：US11675208B1
公开(公告)日：2023-06-13
申请号：US17300091
申请日：2021-03-05
Applicant: J.A. WOOLLAM CO., INC
Inventor： Stefan Schoeche , Martin M. Liphardt , Ping He , Jeremy A Van Derslice , Craig M. Herzinger , Jeffrey S. Hale , Brian D. Guenther , Duane E. Meyer , John A Woollam , James D. Welch
CPC classification number: G02B27/48 , G01B9/02084 , G01B11/24
Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of between 400 nm to between 4400 nm and 18000 nm, and another source of wavelengths to provide between 400 nm and as high as at least 50000 nm; a stage for supporting a sample and a detector of electromagnetic radiation, wherein the source provides a beam of electromagnetic radiation which interacts with a sample and enters a detector system optionally incorporating a wavelength modifier, where the detector system can be functionally incorporated with combinations of gratings and/or combination dichroic beam splitter-prisms, which can be optimized as regards wavelength dispersion characteristics to direct wavelengths in various ranges to various detectors that are well suited to detect them.
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公开(公告)号：US10061068B1
公开(公告)日：2018-08-28
申请号：US15530779
申请日：2017-02-27
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Craig M. Herzinger , Ping He , Jeffrey S. Hale
CPC classification number: G02B27/286 , G02B5/04 , G02B5/3083 , G02B17/006
Abstract: A substantially achromatic multiple element compensator system for use in a wide spectral range, (for example 190-1700 nm), rotating compensator spectroscopic ellipsometer or polarimeter or the like system, which does not require external surface coatings at locations whereat total internal reflections occur. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation. Berek-type retarders on both input and output sides of the multiple elements are oriented to minimize changes in the net retardance vs. wavelength via adjustment of Berek-type retarders. Berek-type retarders.
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公开(公告)号：US09442016B2
公开(公告)日：2016-09-13
申请号：US14121915
申请日：2014-11-04
Applicant: J.A. WOOLLAM CO., INC
Inventor： Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer
CPC classification number: G02B17/0621 , G01J1/0411 , G01J1/0414 , G01J4/00 , G01J4/04 , G01N21/21 , G02B19/0023 , G02B19/0076 , G02B27/0012 , G02B27/286
Abstract: A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
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公开(公告)号：US20220244169A1
公开(公告)日：2022-08-04
申请号：US17300660
申请日：2021-09-16
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Ping He , Martin M. Liphardt , Jeremy A. Van Derslice , Craig M. Herzinger , Jeffrey S. Hale , Brian D. Guenther , Duane E. Meyer , Stefan Schoeche , James D. Welch
Abstract: Ellipsometer, polarimeter, reflectometer and spectrophotometer systems including one or more wavelength modifiers which convert wavelengths provided by a source of electromagnetic radiation to different wavelengths for use in investigating a sample, and/or which a detector thereof can detect.
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公开(公告)号：US10989601B1
公开(公告)日：2021-04-27
申请号：US16873540
申请日：2020-05-01
Applicant: J.A. WOOLLAM CO., INC
Inventor： Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer , Craig M. Herzinger
Abstract: A method of applying a reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with reduced effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved.
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Patent Agency Ranking
公开(公告)号：US10859439B1
公开(公告)日：2020-12-08
申请号：US15330322
申请日：2016-09-06
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Martin M. Lihardt , Ping He , Galen L. Pfeiffer
Abstract: An imaging system, and method of its use, for viewing a sample surface at an inclined angle, preferably in functional combination with a sample investigating reflectometer, spectrophotometer, ellipsometer or polarimeter system; wherein the imaging system provides that a sample surface and multi-element imaging detector surface are oriented with respect to one another to meet the Scheimpflug condition, and wherein a telecentric lens system is simultaneously positioned between the sample surface and the input surface of the multi-element imaging detector such that an image of the sample surface produced by said multi-element imaging detector is both substantially in focus over the extent thereof, and such that substantially no keystone error is demonstrated in said image.
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公开(公告)号：US09500843B1
公开(公告)日：2016-11-22
申请号：US15330106
申请日：2016-08-08
Applicant: J.A. WOOLLAM CO., INC
Inventor： Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer
CPC classification number: G02B17/0621 , G01J1/0411 , G01J1/0414 , G01J4/00 , G01J4/04 , G01N21/21 , G02B19/0023 , G02B19/0076 , G02B27/0012 , G02B27/286
Abstract: A method of calibrating a reflective focusing optics to provide a system that minimizes the effect of multiple beam reflections therewithin on polarization state reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
Abstract translation: 一种校准反射聚焦光学器件的方法，以提供使偏振状态反射光学系统中的多个光束反射的影响最小化的系统，其优选地需要存在具有光束反射表面的凸面和凹面镜，其应用实现 将电磁辐射束聚焦到样品上（其可以沿着与输入光束不同的轨迹），对输入光束偏振态的极化状态的影响最小化，基于调整的入射角和来自 各种镜子涉及。
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公开(公告)号：US10066989B1
公开(公告)日：2018-09-04
申请号：US15330353
申请日：2016-09-09
Applicant: J.A. WOOLLAM CO., INC
Inventor： Martin M. Liphardt , Ping He
Abstract: A system for providing variable wavelength intensity attenuation to said focused beams by application of an aperture-like element that comprises at least two regions of “filter” material, or comprises different materials graded into one another, which different materials that have different responses to different wavelengths, wherein said system is applied to reduce differences in wavelength intensity levels when applied in collimated portions of a beam as a Spectral Angle Adjustor (SAA) or to preserve information in a beam while changing said beam effective diameter as a Spectral Aperture Stop (SAS); or to affect a Spectral Field Stop (SFS) that controls source image size when applied at a convergent/divergent beam focal point as a Spectrally Varying Aperture, (SVA) the end result depending on where in a beam it is applied.
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公开(公告)号：US20150355029A1
公开(公告)日：2015-12-10
申请号：US14121915
申请日：2014-11-04
Applicant: J.A. WOOLLAM CO., INC.
Inventor： Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer
CPC classification number: G02B17/0621 , G01J1/0411 , G01J1/0414 , G01J4/00 , G01J4/04 , G01N21/21 , G02B19/0023 , G02B19/0076 , G02B27/0012 , G02B27/286
Abstract: A reflective optics system that preferably requires the presence of both convex and a concave mirrors that have beam reflecting surfaces, the application of which achieves focusing of a beam of electromagnetic radiation onto a sample, (which can be along a locus differing from that of an input beam), with minimized effects on a polarization state of an input beam state of polarization based on adjusted angles of incidence and reflections from the various mirrors involved.
Abstract translation: 一种反射光学系统，其优选地需要存在具有光束反射表面的凸面镜和凹面镜，其应用实现将电磁辐射束聚焦到样本上（其可以沿着不同于 输入光束），基于调整的入射角和来自各种反射镜的反射，对输入光束偏振态的偏振状态的影响最小化。
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公开(公告)号：US10338362B1
公开(公告)日：2019-07-02
申请号：US15998118
申请日：2018-07-03
Applicant: J.A. WOOLLAM CO., INC
Inventor： Martin M. Liphardt , Jeffrey S. Hale , Ping He , Galen L. Pfeiffer , Duane E. Meyer
Abstract: In ellipsometer and polarimeter systems, reflective optics including both convex and a concave mirrors that have beam reflecting surfaces, as well as aperture control of beam size to optimize operation with respect to aberration and diffraction effects while achieve the focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved, and further including detectors of electromagnetic radiation that enable optimization of the operation thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.
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