公开(公告)号：US11456409B2

公开(公告)日：2022-09-27

申请号：US16771190

申请日：2019-10-31

申请人： JILIN UNIVERSITY

发明人： Zhiwu Han ,  Kejun Wang ,  Honglie Song ,  Junqiu Zhang ,  Daobing Chen ,  Linpeng Liu ,  Binjie Zhang ,  Tao Sun ,  Dakai Wang ,  Changchao Zhang

IPC分类号： H01L41/312 ,  G01H11/08 ,  H01L41/297

摘要： A micro-vibration sensor and preparation method thereof. The method includes a metal sheet is coated with first curing material, and first curing material is cured into first cured layer; piezoelectric thin film element is attached to edge of first cured layer; one side, attached with piezoelectric thin film element, of first cured layer is vertically placed into second curing material, and second curing material is cured into second cured layer; and metal sheet is removed to obtain micro-vibration sensor. Due to fact that piezoelectric thin film element is arranged at a crack tip, during micro-vibration, stress in stress field of crack tip is rapidly increased due to crack stress deformation, and stress signal is efficiently converted into electric signal; and micro-vibration sensor has characteristics of being low in detection limit and high in accuracy.