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公开(公告)号:US07262841B2
公开(公告)日:2007-08-28
申请号:US11083236
申请日:2005-03-17
IPC分类号: G01B11/26
CPC分类号: G01B11/27 , H01J49/0418 , H01J49/164
摘要: An apparatus and method for aligning a laser beam in an ion source. A mounting member has a first end, a second end, and an axis. An awl is positioned on the axis and operably connected to the first end. A biasing member is arranged to urge the awl along the axis when the apparatus is mounted on the ion source to create a mark for aligning the laser beam.
摘要翻译: 用于对准离子源中的激光束的装置和方法。 安装构件具有第一端,第二端和轴。 锥体位于轴上并且可操作地连接到第一端。 偏置构件布置成当装置安装在离子源上时沿着轴推动锥形以产生用于对准激光束的标记。