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公开(公告)号:US10068345B1
公开(公告)日:2018-09-04
申请号:US15896610
申请日:2018-02-14
Inventor: Daliang Zhang , Yu Han , Kun Li , Yihan Zhu
IPC: G06T7/37
Abstract: A system and method involve receiving a sequence of images of an object with at least two consecutive images of the sequence being spatially shifted relative to each other. Each image is transformed into a Fourier domain using a Fourier transform to generate a corresponding plurality of Fourier transformed images. An amplitude filtered pattern is calculated in the Fourier domain based on amplitude components of the plurality of Fourier transformed images. Spatial shifts for pairs of consecutive images in the sequence of images are determined using the amplitude filtered pattern. Images in the sequence of images are aligned based on the determined spatial shifts and the aligned images are summed to form an image-shift-corrected summed image.
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公开(公告)号:US10067078B1
公开(公告)日:2018-09-04
申请号:US15896597
申请日:2018-02-14
Inventor: Daliang Zhang , Yu Han , Kun Li , Yihan Zhu
IPC: G01N23/04 , H01J37/28 , G01N23/20058 , H01J37/26 , H01J37/244
Abstract: A system and method involve applying an electron beam to a sample and obtaining an image of the sample with the applied electron beam. An orientation of the sample relative to the sample's zone axis is automatically determined based on a distribution of reflections in the image. The orientation of the sample is automatically adjusted to align with the sample's zone axis based on the determined orientation.
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