公开(公告)号：US11921052B2

公开(公告)日：2024-03-05

申请号：US18128203

申请日：2023-03-29

Applicant: KLA Corporation

Inventor： Robert M. Danen ,  Sangbong Park ,  Dmitri Starodub ,  Abdurrahman Sezginer

IPC: G01N21/88 ,  G06T5/00 ,  G06T5/50 ,  G06T7/00 ,  H01L21/66

CPC classification number: G01N21/8851 ,  G06T5/002 ,  G06T5/50 ,  G06T7/001 ,  G01N2021/8887 ,  G06T2207/10024 ,  G06T2207/10152 ,  G06T2207/20081 ,  G06T2207/20224 ,  G06T2207/30148 ,  H01L22/12

Abstract: An inspection system may generate first-step images of multiple sample regions after a first process step and generate second-step images of the sample regions after a second process step, where the second process step modifies the sample in at least one of the sample regions. The system may further identify one of the sample regions as a test region and at least some of the remaining sample regions as comparison regions, where the second-step image of the test region is a test image and the second-step images of the comparison regions are comparison images. The system may further generate a multi-step difference image by subtracting a combination of at least one of the second-step comparison images and at least two of the first-step images from the test image. The system may further identify defects in the test region associated with the second process step based on the multi-step difference image.

公开(公告)号：US20230316478A1

公开(公告)日：2023-10-05

申请号：US18128203

申请日：2023-03-29

Applicant: KLA Corporation

Inventor： Robert M. Danen ,  Sangbong Park ,  Dmitri Starodub ,  Abdurrahman Sezginer

IPC: G06T5/50 ,  G06T7/00 ,  G06T5/00

CPC classification number: G06T5/50 ,  G06T7/001 ,  G06T5/002 ,  G06T2207/20224 ,  G06T2207/10024 ,  G06T2207/20081 ,  G06T2207/30148

Abstract: An inspection system may generate first-step images of multiple sample regions after a first process step and generate second-step images of the sample regions after a second process step, where the second process step modifies the sample in at least one of the sample regions. The system may further identify one of the sample regions as a test region and at least some of the remaining sample regions as comparison regions, where the second-step image of the test region is a test image and the second-step images of the comparison regions are comparison images. The system may further generate a multi-step difference image by subtracting a combination of at least one of the second-step comparison images and at least two of the first-step images from the test image. The system may further identify defects in the test region associated with the second process step based on the multi-step difference image.