Flexible inspection system
    4.
    发明授权

    公开(公告)号:US12072300B2

    公开(公告)日:2024-08-27

    申请号:US18298561

    申请日:2023-04-11

    CPC classification number: G01N21/9515 B25J9/1679 G01N21/8851 G01N2021/9518

    Abstract: A flexible inspection system includes a robot with a plurality of scanners and a robot controller. The robot controller is configured to receive a vehicle inspection protocol (VIP) for a vehicle being assembled on an assembly line. The VIP includes checkpoints to be scanned on the vehicle and the checkpoints correspond to components installed on the vehicle and connections between components installed on the vehicle. The robot controller commands the robot to move the plurality of scanners per the VIP such that the checkpoints are scanned. A characteristic of each checkpoint is recorded and compared to a reference characteristic such that a pass or no-pass determination of each checkpoint is provided. A vehicle inspection report with the pass/no-pass determinations is provided to an operator such that operator inspections and/or repairs of the checkpoints are made.

    OPTICAL APPARATUS AND FOCUS CORRECTION METHOD

    公开(公告)号:US20240280502A1

    公开(公告)日:2024-08-22

    申请号:US18581794

    申请日:2024-02-20

    Inventor: Minoru HOSOMI

    Abstract: An optical apparatus according to the present embodiment includes a detector for detecting detection light of illumination light reflected by a sample, an optical system for illuminating the sample with the illumination light and guiding the detection light reflected by the sample to the detector, a displacement measurement unit for measuring a displacement drift indicating the amount of drift in the position of an optical element included in the optical system, a storage unit for storing the correlation between the displacement drift and a focus drift indicating the amount of drift in the distance between the sample and the optical system when the detection light detected by the detector is brought into focus, and a prediction unit for predicting a focus drift from the measured displacement drift by using the correlation.

    DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD, AND ADJUSTMENT SUBSTRATE

    公开(公告)号:US20240230551A9

    公开(公告)日:2024-07-11

    申请号:US18271496

    申请日:2021-03-09

    CPC classification number: G01N21/8806 G01N21/8851 G01N21/93 G01N2021/8848

    Abstract: A defect inspection device includes: an illumination optical system including a polarization element configured to switch polarization of irradiation light between first polarization and second polarization orthogonal to the first polarization; a polarization diffraction grating configured to emit diffraction light of a specific order of the irradiation light in a direction along a normal line of a sample stage surface, a diffraction efficiency of the specific order of the first polarization of the irradiation light is equal to or less than 20% of a diffraction efficiency of the specific order of the second polarization, the polarization diffraction grating being settable at a light collection position of the irradiation light on the sample stage surface and including an anisotropic pattern whose period is equal to or less than twice a wavelength of the irradiation light; a detection optical system.

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