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1.发明申请公开(公告)号：US20160025645A1
公开(公告)日：2016-01-28
申请号：US14804296
申请日：2015-07-20
Applicant: KLA-Tencor Corporation
Inventor： Chuanyong Huang , Qing Li , Donald Pettibone , Buzz Graves
CPC classification number: G01N21/8806 , G01N21/9501 , G01N2021/8825
Abstract: An inspection apparatus for simultaneous dark field (DF) and differential interference contrast (DIC) inspection includes an illumination source and a sample stage configured to secure a sample. The inspection apparatus includes a first sensor, a second sensor and an optical sub-system. The optical sub-system includes an objective, one or more optical elements arranged to direct, through the objective, illumination from the one or more illumination sources to a surface of the sample. The objective is configured to collect a signal from the surface of the sample, wherein the collected signal includes a scattering-based signal and/or a phase-based signal from the sample. The inspection apparatus includes one or more separation optical elements arranged to spatially separate the collected signal into a DF signal and a DIC signal by directing the DF signal and the DIC signal along a DF path and DIC path respectively.
Abstract translation: 用于同时暗场（DF）和差分干涉对比（DIC）检查的检查装置包括照明源和被配置为固定样品的样品台。 检查装置包括第一传感器，第二传感器和光子系统。 光学子系统包括物镜，一个或多个光学元件，被布置成通过物镜引导从一个或多个照明源到样品表面的照明。 该目的被配置为从样品的表面收集信号，其中所收集的信号包括来自样品的基于散射的信号和/或基于相位的信号。 检查装置包括一个或多个分离光学元件，其被布置为通过分别沿DF路径和DIC路径引导DF信号和DIC信号来将收集的信号空间分离成DF信号和DIC信号。
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公开(公告)号：US09726615B2
公开(公告)日：2017-08-08
申请号：US14804296
申请日：2015-07-20
Applicant: KLA-Tencor Corporation
Inventor： Chuanyong Huang , Qing Li , Donald Pettibone , Buzz Graves
CPC classification number: G01N21/8806 , G01N21/9501 , G01N2021/8825
Abstract: An inspection apparatus for simultaneous dark field (DF) and differential interference contrast (DIC) inspection includes an illumination source and a sample stage configured to secure a sample. The inspection apparatus includes a first sensor, a second sensor and an optical sub-system. The optical sub-system includes an objective, one or more optical elements arranged to direct, through the objective, illumination from the one or more illumination sources to a surface of the sample. The objective is configured to collect a signal from the surface of the sample, wherein the collected signal includes a scattering-based signal and/or a phase-based signal from the sample. The inspection apparatus includes one or more separation optical elements arranged to spatially separate the collected signal into a DF signal and a DIC signal by directing the DF signal and the DIC signal along a DF path and DIC path respectively.
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