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公开(公告)号：US20160141161A1
公开(公告)日：2016-05-19
申请号：US14934107
申请日：2015-11-05
Applicant: KLA-Tencor Corporation
Inventor： Derek Cameron Mackay
Abstract: An internal portion of a photomultiplier tube (PMT) having a reflective photocathode array, and a method for manufacturing the same, are provided. The internal portion of the PMT comprises the reflective photocathode array and at least one dynode structure corresponding to the array of reflective photocathodes. Each reflective photocathode receives light and from the light, generates photoelectrons which then travel towards the at least one dynode structure. Upon the photoelectrons making contact with the at least one dynode structure, the photoelectrons are multiplied.
Abstract translation: 提供了具有反射光电阴极阵列的光电倍增管（PMT）的内部部分及其制造方法。 PMT的内部部分包括反射光电阴极阵列和对应于反射光电阴极阵列的至少一个倍增极结构。 每个反射光电阴极接收光并且从光产生光电子，然后光电子朝向至少一个倍增电极结构行进。 当光电子与至少一个倍增极结构接触时，光电子被倍增。
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公开(公告)号：US09543130B2
公开(公告)日：2017-01-10
申请号：US14934107
申请日：2015-11-05
Applicant: KLA-Tencor Corporation
Inventor： Derek Cameron Mackay
Abstract: An internal portion of a photomultiplier tube (PMT) having a reflective photocathode array, and a method for manufacturing the same, are provided. The internal portion of the PMT comprises the reflective photocathode array and at least one dynode structure corresponding to the array of reflective photocathodes. Each reflective photocathode receives light and from the light, generates photoelectrons which then travel towards the at least one dynode structure. Upon the photoelectrons making contact with the at least one dynode structure, the photoelectrons are multiplied.
Abstract translation: 提供了具有反射光电阴极阵列的光电倍增管（PMT）的内部部分及其制造方法。 PMT的内部部分包括反射光电阴极阵列和对应于反射光电阴极阵列的至少一个倍增极结构。 每个反射光电阴极接收光并且从光产生光电子，然后光电子朝向至少一个倍增电极结构行进。 当光电子与至少一个倍增极结构接触时，光电子被倍增。
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