公开(公告)号：US20200225574A1

公开(公告)日：2020-07-16

申请号：US16258118

申请日：2019-01-25

Applicant: KLA-Tencor Corporation

Inventor： Damon F. Kvamme ,  Rui-fang Shi ,  Daniel C. Wack ,  Sseunhyeun Jo ,  Xin Ye

IPC: G03F1/84 ,  G03F1/24 ,  G03F1/72

Abstract: An inspection system includes an illumination source configured to generate extreme ultraviolet (EUV) light, illumination optics to direct the EUV light to a sample within a range of off-axis incidence angles corresponding to an illumination pupil distribution, collection optics to collect light from the sample in response to the incident EUV light within a range of collection angles corresponding to an imaging pupil distribution, and a detector configured to receive at least a portion of the light collected by the collection optics. Further, a center of the illumination pupil distribution corresponds to an off-axis incidence angle along a first direction on the sample, and at least one of the illumination pupil distribution or the imaging pupil distribution is non-circular with a size along the first direction shorter than along a second direction perpendicular to the first direction.

公开(公告)号：US11112691B2

公开(公告)日：2021-09-07

申请号：US16258118

申请日：2019-01-25

Applicant: KLA-Tencor Corporation

Inventor： Damon F. Kvamme ,  Rui-fang Shi ,  Daniel C. Wack ,  Sseunhyeun Jo ,  Xin Ye

IPC: G03F1/84 ,  G03F1/72 ,  G03F1/24

Abstract: An inspection system includes an illumination source configured to generate extreme ultraviolet (EUV) light, illumination optics to direct the EUV light to a sample within a range of off-axis incidence angles corresponding to an illumination pupil distribution, collection optics to collect light from the sample in response to the incident EUV light within a range of collection angles corresponding to an imaging pupil distribution, and a detector configured to receive at least a portion of the light collected by the collection optics. Further, a center of the illumination pupil distribution corresponds to an off-axis incidence angle along a first direction on the sample, and at least one of the illumination pupil distribution or the imaging pupil distribution is non-circular with a size along the first direction shorter than along a second direction perpendicular to the first direction.