公开(公告)号：US20220157554A1

公开(公告)日：2022-05-19

申请号：US17454998

申请日：2021-11-15

Applicant: KOREA BASIC SCIENCE INSTITUTE

Inventor： Sang Ju LEE ,  Myoung Choul CHOI ,  Chang Min CHOI ,  Aram HONG ,  Ji Young BAEK

IPC: H01J37/08

Abstract: A mixed gas cluster ion beam generator may include a nozzle chamber to contain a first mixed gas which is a mixed gas that is a mix of a first gas and a second gas, a cluster nozzle to spray gas received from the nozzle chamber in a cluster form, an ionizer to ionize a gas cluster sprayed by the cluster nozzle, and an ion accelerator to emit an ion beam to the outside by accelerating the gas cluster ionized by the ionizer by generating a potential difference to the ionized gas cluster.