公开(公告)号：US20220157554A1

公开(公告)日：2022-05-19

申请号：US17454998

申请日：2021-11-15

Applicant: KOREA BASIC SCIENCE INSTITUTE

Inventor： Sang Ju LEE ,  Myoung Choul CHOI ,  Chang Min CHOI ,  Aram HONG ,  Ji Young BAEK

IPC: H01J37/08

Abstract: A mixed gas cluster ion beam generator may include a nozzle chamber to contain a first mixed gas which is a mixed gas that is a mix of a first gas and a second gas, a cluster nozzle to spray gas received from the nozzle chamber in a cluster form, an ionizer to ionize a gas cluster sprayed by the cluster nozzle, and an ion accelerator to emit an ion beam to the outside by accelerating the gas cluster ionized by the ionizer by generating a potential difference to the ionized gas cluster.

公开(公告)号：US20190355542A1

公开(公告)日：2019-11-21

申请号：US16185527

申请日：2018-11-09

Applicant: KOREA BASIC SCIENCE INSTITUTE

Inventor： Chang Min CHOI ,  Myoung Choul CHOI ,  Sang Ju LEE ,  Ji Young BAEK ,  Jeong Jin KIM

IPC: H01J37/08 ,  H01J37/244

Abstract: Disclosed is a device for generating an organic molecular cluster ion beam, the device including a receiver configured to accommodate an organic material, a cluster generator configured to generate a cluster by supersonic expanding the organic material accommodated in the receiver at a high speed, a photo-ionizer configured to temporarily accommodate the cluster that is generated through the cluster generator, an ultraviolet (UV) light source configured to irradiate an UV pulse to the photo-ionizer to ionize the cluster, and entrance electrodes disposed at both sides of the photo-ionizer and configured to provide a potential difference to the photo-ionizer to generate a cluster ion beam.