BOBBIN AND COIL ASSEMBLY AND ELECTROMAGNET EQUIPMENT INCLUDING SAME

    公开(公告)号:US20190115144A1

    公开(公告)日:2019-04-18

    申请号:US16152568

    申请日:2018-10-05

    Abstract: The present invention relates to a bobbin and a coil assembly and electromagnet equipment including the same, and the electromagnet equipment, which includes a bobbin and a coil, includes a coil assembly receiving a refrigerant so as to remove heat produced when magnetic field lines are famed by an electric current running through the coil while the coil is wound on a center shaft relative to the center shaft provided on a center of the bobbin; and a terminal block provided on a lower side of the coil assembly, the terminal block supporting the coil assembly and receiving a refrigerant from outside and supplying the refrigerant to the coil assembly.

    WAFER INSPECTION APPARATUS
    3.
    发明申请

    公开(公告)号:US20180364181A1

    公开(公告)日:2018-12-20

    申请号:US15974111

    申请日:2018-05-08

    Abstract: Disclosed is a wafer inspection apparatus. The wafer inspection apparatus includes: a magnetic field generating unit forming a magnetic field such that magnetic lines of force flow in a direction perpendicular or parallel to a first surface of a wafer on which a magnetic thin film is formed; a microwave guide unit emitting microwaves to a measurement region that is at least a partial region of the wafer and is a region affected by the magnetic field generated by the magnetic field generating unit; and a sensing unit receiving waves reflected or transmitted after the microwaves are emitted to the measurement region from the microwave guide unit.

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