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公开(公告)号：US10538839B2
公开(公告)日：2020-01-21
申请号：US15511240
申请日：2015-09-14
Applicant: KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY
Inventor： Ho Nyun Lee , Hyun Jong Kim
Abstract: A method for manufacturing a metal or metal oxide porous thin film having a three-dimensional open-network structure by controlling its pore size through a dry process is provided. The film can be used in a gas sensor, a biosensor, a battery capacitor, a fuel cell, a solar cell, a chemical catalyst, or an antibacterial filter.
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