公开(公告)号：US20170082574A1

公开(公告)日：2017-03-23

申请号：US15254322

申请日：2016-09-01

Applicant: Korea Institute of Science and Technology

Inventor： Young Tae BYUN ,  Jae Seong KIM ,  Je Haeng LEE ,  Sun Ho KIM ,  Young Min JHON ,  Sun Woo CHOI

IPC: G01N27/414 ,  C23C14/34 ,  H01L51/00 ,  B82Y15/00 ,  B82Y40/00 ,  B22F1/02 ,  C23C14/18 ,  C23C14/58

CPC classification number: H01L51/0026 ,  B22F1/025 ,  B22F7/04 ,  B22F2007/042 ,  B22F2301/25 ,  B22F2302/403 ,  B22F2304/054 ,  B22F2998/10 ,  B22F2999/00 ,  B82Y30/00 ,  B82Y40/00 ,  C23C14/185 ,  C23C14/5806 ,  G01N27/12 ,  H01L51/0003 ,  H01L51/0048 ,  H01L51/0096 ,  B22F3/10 ,  B22F9/026 ,  B22F2003/248 ,  B22F1/0018 ,  C22C2026/002 ,  B22F2201/11

Abstract: A gas sensor and a method of fabricating the same are provided. The gas sensor includes a substrate, carbon nanotubes (CNTs) adsorbed onto the substrate, platinum nanoparticles (NPs) decorated to surfaces of the CNTs, and an electrode formed on the substrate onto which the CNTs with the platinum NPs decorated thereto are adsorbed. When the platinum NPs and CNTs are used as a sensing material, the gas sensor can be useful in sensing gases with high sensitivity even when present at a low concentration of at least 2 ppm and stably sensing noxious gases such as C6H6, C7H8, C3H6O, CO, NO, and NH3 as well as NO2, and can have particularly excellent selectivity and response characteristics with respect to NO2 gas.