公开(公告)号：US20140217895A1

公开(公告)日：2014-08-07

申请号：US13756986

申请日：2013-02-01

Applicant: LAM RESEARCH CORPORATION

Inventor： Matt Busche ,  Adam Mace ,  Michael Kang ,  Allan Ronne

IPC: H01J37/32

CPC classification number: H01J37/32522 ,  H01J37/32119

Abstract: A temperature controlled dielectric window of an inductively coupled plasma processing chamber includes a dielectric window forming a top wall of the plasma processing chamber having at least first and second channels therein. A liquid circulating system includes a source of cold liquid circulating in a first closed loop which is not in fluid communication with the channels, a source of hot liquid circulating in a second closed loop which is in fluid communication with the channels, and first and second heat exchangers. The cold liquid passes through the first heat exchanger at a controllable flow rate and temperature of the hot liquid is adjusted by heat exchange with the cold liquid as the hot liquid passes through the first heat exchanger and then through the inlet of the first channel. The cold liquid passes through the second heat exchanger at a controllable flow rate and temperature of the hot liquid is adjusted by heat exchange with the cold liquid as the hot liquid passes through the second heat exchanger and then through the inlet of the second channel.

Abstract translation: 电感耦合等离子体处理室的温度控制电介质窗包括形成等离子体处理室的顶壁的电介质窗口，其中至少具有第一和第二通道。 液体循环系统包括在与通道不流体连通的第一闭环中循环的冷液体源，在与通道流体连通的第二闭环中循环的热液体源，以及第一和第二 热交换器。 冷液体以可控的流速通过第一热交换器，当热液体通过第一热交换器然后通过第一通道的入口时，通过与冷液体的热交换来调节热液体的温度。 冷液体以可控的流速通过第二热交换器，当热液体通过第二热交换器然后通过第二通道的入口时，通过与冷液体的热交换来调节热液体的温度。

公开(公告)号：US08970114B2

公开(公告)日：2015-03-03

申请号：US13756986

申请日：2013-02-01

Applicant: Lam Research Corporation

Inventor： Matt Busche ,  Adam Mace ,  Michael Kang ,  Allan Ronne

IPC: H01J7/24 ,  H01J37/32

CPC classification number: H01J37/32522 ,  H01J37/32119

Abstract: A temperature controlled dielectric window of an inductively coupled plasma processing chamber includes a dielectric window forming a top wall of the plasma processing chamber having at least first and second channels therein. A liquid circulating system includes a source of cold liquid circulating in a first closed loop which is not in fluid communication with the channels, a source of hot liquid circulating in a second closed loop which is in fluid communication with the channels, and first and second heat exchangers. The cold liquid passes through the first heat exchanger at a controllable flow rate and temperature of the hot liquid is adjusted by heat exchange with the cold liquid as the hot liquid passes through the first heat exchanger and then through the inlet of the first channel. The cold liquid passes through the second heat exchanger at a controllable flow rate and temperature of the hot liquid is adjusted by heat exchange with the cold liquid as the hot liquid passes through the second heat exchanger and then through the inlet of the second channel.

Abstract translation: 电感耦合等离子体处理室的温度控制电介质窗包括形成等离子体处理室的顶壁的电介质窗口，其中至少具有第一和第二通道。 液体循环系统包括在与通道不流体连通的第一闭环中循环的冷液体源，在与通道流体连通的第二闭环中循环的热液体源，以及第一和第二 热交换器。 冷液体以可控的流速通过第一热交换器，当热液体通过第一热交换器然后通过第一通道的入口时，通过与冷液体的热交换来调节热液体的温度。 冷液体以可控的流速通过第二热交换器，当热液体通过第二热交换器然后通过第二通道的入口时，通过与冷液体的热交换来调节热液体的温度。