公开(公告)号：US11732344B2

公开(公告)日：2023-08-22

申请号：US16596558

申请日：2019-10-08

Applicant: LG Display Co., Ltd.

Inventor： Ji-Man Seo ,  Hoyoung Jeong ,  Jaewook Park

IPC: C23C14/24 ,  H10K71/00

CPC classification number: C23C14/24 ,  H10K71/00

Abstract: The present disclosure relates to a lateral-type vacuum deposition apparatus, and a source block and a source assembly for the same. Disclosed are a source block that may simplify a lateral-type vacuum deposition apparatus and a lateral-type vacuum deposition apparatus using the same. The source block has a predetermined shape. In the lateral-type vacuum deposition apparatus, the substrate and the source block may face away each other. Accordingly, the lateral-type vacuum deposition apparatus including the source block is free of a conduit for transferring a vaporized source to a nozzle, thereby simplifying a structure of the apparatus. In particular, the source block may have a visible light transmittance of at least about 10% and may exhibit excellent shape maintenance ability during a lateral-type vacuum deposition process.