公开(公告)号：US20030124443A1

公开(公告)日：2003-07-03

申请号：US10319721

申请日：2002-12-16

Applicant: LG.PHILIPS LCD CO., LTD.

Inventor： Hun Jeoung

IPC: G03F007/22

CPC classification number: G03F7/70633

Abstract: An exposure method for a liquid crystal display devices formed as a plurality of unit panels on a large-sized sheet of glass using a stepper includes the steps of recording benchmark measurements of the large-sized sheet of glass, determining a change in dimension of the large-sized sheet of glass prior to a stepper positioning and exposing a mask on at least one unit panel of the plurality of unit panels, and compensating for the change in dimension by changing a position of an exposure for the at least one unit panel to a position other than where the stepper had previously exposed the at least one unit panel with a first mask.

Abstract translation: 使用步进器在大尺寸玻璃板上形成为多个单元面板的液晶显示装置的曝光方法包括以下步骤：记录大尺寸玻璃板的基准测量值，确定大尺寸玻璃板的尺寸变化 在步进定位之前的大尺寸玻璃板并且将掩模暴露在所述多个单元面板中的至少一个单元面板上，并且通过将所述至少一个单元面板的曝光位置改变为 除了步进器先前已经用第一掩模暴露至少一个单元面板之外的位置。