公开(公告)号：US10429167B2

公开(公告)日：2019-10-01

申请号：US15682904

申请日：2017-08-22

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Nakagawa ,  Nobuhiro Ishikawa

IPC: G01B5/008 ,  G01B5/012 ,  G01B21/04 ,  G01B7/012 ,  G01B11/00

Abstract: As a former correction step, a coordinate correction method includes: a step of setting a measuring probe in a drive mechanism; a step of restraining a measurement tip; a step of acquiring a moving amount and a probe output; and a step of generating a former correction matrix including linear correction elements and non-linear correction elements. As a latter correction step, the coordinate correction method includes: a step of setting a measuring probe in a drive mechanism; a step of restraining a measurement tip; a step of acquiring a moving amount and a probe output; a step of generating an intermediate correction matrix including linear correction elements for correcting the probe output; and a step of correcting the probe output with a latter correction matrix. Consequently, correction can be simplified while allowing for correction of a non-linear error of the probe output supplied from the measuring probe.

公开(公告)号：US10422636B2

公开(公告)日：2019-09-24

申请号：US15681926

申请日：2017-08-21

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Nakagawa ,  Nobuhiro Ishikawa

IPC: G01B5/008 ,  G01B21/04 ,  G01B5/012 ,  G06F17/16

Abstract: A processing device includes: a pushing drive mechanism control unit that brings a measurement tip into contact with a surface of a calibration artifact at a single point in each of five directions are all normal directions to the surface of the calibration artifact; a scanning drive mechanism control unit that reciprocates the measurement tip on the surface of the calibration artifact on each of three planes perpendicular to one another; a coordinate acquisition unit that acquires a moving amount and a probe output of a measuring probe; a matrix generation unit that generates a correction matrix; and a probe output correction unit that corrects the probe output with the correction matrix. This enables an improvement in asymmetric probe characteristics of the probe output, which is outputted from the measuring probe, in a particular plane. Thus, shape coordinates of an object to be measured can be obtained with high accuracy.

公开(公告)号：US09683839B2

公开(公告)日：2017-06-20

申请号：US14732056

申请日：2015-06-05

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Nakagawa ,  Nobuhiro Ishikawa

IPC: G01B21/04 ,  G01B5/008

CPC classification number: G01B21/045 ,  G01B5/008

Abstract: In a shape measuring apparatus having a scanning probe to perform scanning measurement using a tip ball provided at an end of a stylus with the tip ball being in contact with an object to be measured, a tip ball displacement detector detects a displacement of the tip ball of the scanning probe, a displacement of a moving mechanism that relatively moves the object to be measured and the scanning probe is detected, and an angle formed by a contact direction of the tip ball with the object to be measured and an axial direction of the stylus is calculated. The displacement of the tip ball that is detected by the tip ball displacement detector is corrected on the basis of the angle, and a corrected value of the displacement is outputted. The corrected value is added to the displacement of the moving mechanism to calculate a measurement value.

公开(公告)号：US10429166B2

公开(公告)日：2019-10-01

申请号：US15680653

申请日：2017-08-18

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Nakagawa ,  Nobuhiro Ishikawa

IPC: G01B5/008 ,  G01B3/22 ,  G01B21/04

Abstract: A processing device includes: a coordinate acquisition unit that acquires a moving amount of a measuring probe and a probe output; a matrix generation unit that generates a correction matrix including linear correction elements and non-linear correction elements; and a probe output correction unit that corrects the probe output with the correction matrix. The coordinate acquisition unit acquires the moving amount and the probe output of the measuring probe in each of measurement points in a quantity larger than or equal to the sum of the number of the linear correction elements and the number of the non-linear correction elements. Consequently, a non-linear error of the probe output supplied from the measuring probe can be corrected, and thus shape coordinates of an object to be measured can be obtained with high accuracy.

公开(公告)号：US09719779B2

公开(公告)日：2017-08-01

申请号：US14929588

申请日：2015-11-02

Applicant: MITUTOYO CORPORATION

Inventor： Nobuhiro Ishikawa ,  Hideyuki Nakagawa

IPC: G01B5/04 ,  G01B21/04

CPC classification number: G01B21/045

Abstract: A form measuring machine includes: a scanning probe including a stylus with a tip ball and a probe body attached with the stylus; a movable slider supporting the scanning probe; a scale detecting a slider displacement of the slider; a tip ball displacement detector detecting a tip ball displacement of the tip ball; and an arithmetic unit calculating a measurement value based on the slider displacement, the tip ball displacement and a correction filter and comprising a correction filter setting section that: calculates a correction matrix diagonal component from the slider displacement and the tip ball displacement detected by calibration of the scanning probe; and calculates a correction factor of the correction filter from the correction matrix diagonal component to set the correction filter.

公开(公告)号：US09464877B2

公开(公告)日：2016-10-11

申请号：US14617135

申请日：2015-02-09

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Nakagawa ,  Nobuhiro Ishikawa

IPC: G01B5/008 ,  G01B5/016

CPC classification number: G01B5/008 ,  G01B5/016 ,  G01B21/045

Abstract: A calculator includes a first filter, a second filter, and an adding device. The first filter outputs, as a first corrected value, a value in which displacement of a displacement table detected by a scale has been corrected based on first frequency transfer characteristics from a scale to a measured object station. The second filter outputs, as a second corrected value, a value in which the first corrected value is corrected based on second frequency transfer characteristics from a ball tip to a ball tip displacement detector. The adding device adds the second corrected value and displacement of the ball tip detected by the ball tip displacement detector to calculate a measured value.

Abstract translation: 计算器包括第一滤波器，第二滤波器和加法装置。 第一滤波器作为第一校正值输出基于从刻度尺到测量对象站的第一频率传递特性来校正由刻度尺检测的位移表的位移的值。 第二滤波器作为第二校正值输出基于从球头到球头位移检测器的第二频率传递特性校正第一校正值的值。 添加装置添加由球头位移检测器检测出的第二校正值和球尖的位移，以计算测量值。

公开(公告)号：US09097504B2

公开(公告)日：2015-08-04

申请号：US14066804

申请日：2013-10-30

Applicant: MITUTOYO CORPORATION

Inventor： Nobuhiro Ishikawa ,  Hideyuki Nakagawa

IPC: G01B5/008 ,  G01B21/04

CPC classification number: G01B5/008 ,  G01B21/045

Abstract: A shape measuring machine includes a slider that supports a scanning probe including a tip sphere. A scale unit detects a displacement of the slider. A tip sphere displacement detection unit detects a displacement of the tip sphere. A calculation unit includes a correction filter and an adder, and calculates a measurement value from the displacements of the slider and the tip sphere. The correction filter outputs a correction value that is obtained by correcting the displacement of the tip sphere detected by the tip sphere displacement detection unit based on an inverse characteristic of a frequency transfer characteristic from the scale unit to the tip sphere. The adder calculates the measurement value by adding the displacement of the slider detected by the scale unit and the correction value.

Abstract translation: 一种形状测量机包括支撑包括尖端球体的扫描探针的滑块。 刻度单元检测滑块的位移。 尖端球体位移检测单元检测尖端球体的位移。 计算单元包括校正滤波器和加法器，并且根据滑块和尖端球体的位移来计算测量值。 校正滤波器输出校正值，其通过基于从刻度单元到尖端球体的频率传递特性的反特性来校正由尖端球体位移检测单元检测到的尖端球的位移而获得。 加法器通过将由比例单元检测到的滑块的位移和校正值相加来计算测量值。

公开(公告)号：US09091522B2

公开(公告)日：2015-07-28

申请号：US13971235

申请日：2013-08-20

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Nakagawa ,  Nobuhiro Ishikawa

IPC: G01B5/008 ,  G01B21/04

CPC classification number: G01B5/008 ,  G01B21/045

Abstract: A shape measuring machine includes a slider that supports a scanning probe. A scale unit detects a displacement of the slider. A tip sphere displacement detection unit detects a displacement of the tip sphere. A calculation unit includes a correction filter including a first and second filters and an adder, and calculates a measurement value from the displacements of the slider and the tip sphere. The first filter corrects the displacement of the slider based on a frequency transfer characteristic from the scale unit to the tip of the slider. The second filter outputs a value that is obtained by correcting a value corrected by the first filter based on a frequency transfer characteristic from the tip of the slider to the tip sphere as the correction value. The adder outputs a measurement value obtained by adding the correction value and the displacement of the tip sphere.

Abstract translation: 形状测量机包括支撑扫描探针的滑块。 刻度单元检测滑块的位移。 尖端球体位移检测单元检测尖端球体的位移。 计算单元包括具有第一和第二滤波器的校正滤波器和加法器，并且根据滑块和尖端球体的位移来计算测量值。 第一个滤波器基于从刻度单元到滑块的尖端的频率传递特性来校正滑块的位移。 第二滤波器输出通过基于从滑块的尖端到尖端球的频率传递特性来校正由第一滤波器校正的值而获得的值作为校正值。 加法器输出通过将校正值和尖端球体的位移相加而获得的测量值。

公开(公告)号：US09746303B2

公开(公告)日：2017-08-29

申请号：US14621926

申请日：2015-02-13

Applicant: MITUTOYO CORPORATION

Inventor： Hideyuki Nakagawa ,  Nobuhiro Ishikawa

IPC: G01B5/012 ,  G01B5/008 ,  G01B21/04

CPC classification number: G01B5/008 ,  G01B21/042 ,  G01B21/045

Abstract: A first correction component calculation processing unit calculates diagonal components of a correction matrix based on first and second detection values. The first and second detection values are obtained by measurement in which a calibration reference body and the probe are moved relatively to each other in a normal direction on a surface of the calibration reference body so as to bring a measurement tip into contact with the surface of the calibration reference body at one point. A second correction component calculation processing unit calculates non-diagonal components of the correction matrix based on third and fourth detection values. The third and fourth detection values are obtained by scanning measurement using the measurement tip on the surface of the calibration reference body while maintaining a constant relative distance between the center of the measurement tip and a reference point or a reference line of the calibration reference body.

公开(公告)号：US20160131470A1

公开(公告)日：2016-05-12

申请号：US14929588

申请日：2015-11-02

Applicant: MITUTOYO CORPORATION

Inventor： Nobuhiro Ishikawa ,  Hideyuki Nakagawa

IPC: G01B5/008

CPC classification number: G01B21/045

Abstract: A form measuring machine includes: a scanning probe including a stylus with a tip ball and a probe body attached with the stylus; a movable slider supporting the scanning probe; a scale detecting a slider displacement of the slider; a tip ball displacement detector detecting a tip ball displacement of the tip ball; and an arithmetic unit calculating a measurement value based on the slider displacement, the tip ball displacement and a correction filter and comprising a correction filter setting section that: calculates a correction matrix diagonal component from the slider displacement and the tip ball displacement detected by calibration of the scanning probe; and calculates a correction factor of the correction filter from the correction matrix diagonal component to set the correction filter.

Abstract translation: 一种形状测量机包括：扫描探头，其包括具有尖端球的触针和附接有触针的探针主体; 支撑扫描探针的可移动滑块; 检测滑块的滑块位移的刻度; 检测尖端球的尖端球位移的尖端球位移检测器; 以及算术单元，其基于所述滑块位移，所述尖端球位移和校正滤波器来计算测量值，并且包括校正滤波器设置部分，其从所述滑块位移和通过校准检测到的所述尖端球位移计算校正矩阵对角线分量 扫描探针; 并从校正矩阵对角线分量计算校正滤波器的校正因子，以设置校正滤波器。