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公开(公告)号:US11193757B2
公开(公告)日:2021-12-07
申请号:US16717320
申请日:2019-12-17
Applicant: MITUTOYO CORPORATION
Inventor: Satoru Yoshida , Tatsuya Nagahama , Masafumi Yamanaka , Hitoshi Isobe , Naoto Oita , Koji Kubo , Yuko Shishido , Nobuo Ohba , Takahisa Ootake , Hiroki Matsui , Masanori Arai , Shiro Igasaki , Yuki Kurahashi , Hiroshi Sakai , Yutaka Watanabe
Abstract: An image measurement apparatus, which functions as a non-contact profile-measuring device, includes: an image sensor as an image pick-up device; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from a workpiece to the image sensor; and a controller (image-pickup lens controller and image measurement processor) configured to control the variable focal length lens and process a detected image by the image sensor. The image measurement apparatus, which also functions as a non-contact displacement-detecting device, includes: an image sensor; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from the workpiece to the image sensor; and a controller (displacement-detection lens controller and profile measurement processor) configured to control the variable focal length lens and a detected image by the image sensor.