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公开(公告)号：US11644304B2
公开(公告)日：2023-05-09
申请号：US17106638
申请日：2020-11-30
申请人： MITUTOYO CORPORATION
发明人： Masafumi Yamanaka
CPC分类号： G01B11/02 , G02B27/0075 , H04N23/55 , H04N23/673
摘要： A height measurement device includes: a lens system; a lens controller to output a drive signal to the lens system; a continuous illuminator to continuously illuminate a workpiece; an image detector to detect an image of the workpiece; an image calculation unit to calculate an EDOF image on a basis of a detected image; a focal depth adjustment unit to cause an extended focal depth of the EDOF image to be increased or decreased by increasing or decreasing an amplitude of the drive signal; a focus determination unit to determine a focus state of a portion of interest of the workpiece included in the EDOF image; and a height measurement unit to measure an upper limit or a lower limit of the extended focal depth, the upper limit or the lower limit being based on a timing at which the focus state of the portion of interest has changed.
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公开(公告)号：US11193757B2
公开(公告)日：2021-12-07
申请号：US16717320
申请日：2019-12-17
申请人： MITUTOYO CORPORATION
发明人： Satoru Yoshida , Tatsuya Nagahama , Masafumi Yamanaka , Hitoshi Isobe , Naoto Oita , Koji Kubo , Yuko Shishido , Nobuo Ohba , Takahisa Ootake , Hiroki Matsui , Masanori Arai , Shiro Igasaki , Yuki Kurahashi , Hiroshi Sakai , Yutaka Watanabe
摘要： An image measurement apparatus, which functions as a non-contact profile-measuring device, includes: an image sensor as an image pick-up device; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from a workpiece to the image sensor; and a controller (image-pickup lens controller and image measurement processor) configured to control the variable focal length lens and process a detected image by the image sensor. The image measurement apparatus, which also functions as a non-contact displacement-detecting device, includes: an image sensor; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from the workpiece to the image sensor; and a controller (displacement-detection lens controller and profile measurement processor) configured to control the variable focal length lens and a detected image by the image sensor.
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