公开(公告)号：US10295337B2

公开(公告)日：2019-05-21

申请号：US15433234

申请日：2017-02-15

Applicant: MITUTOYO CORPORATION

Inventor： Sadayuki Matsumiya ,  Shuichi Kamiyama ,  Hidemitsu Asano ,  Hiroshi Sakai ,  Hiromu Maie ,  Yoshihiko Takahashi ,  Masanori Arai ,  Ken Motohashi

IPC: G01B5/00 ,  G01B5/06 ,  G01B5/12 ,  G01B11/06 ,  G01B11/12 ,  G01B11/24 ,  G01B11/30

Abstract: A surface texture measuring apparatus includes an X axis displacement mechanism and a Y axis displacement mechanism displacing a measurable object having an interior wall along an XY plane; a measurement sensor measuring a surface texture of the interior wall without contact; a Z axis displacement mechanism displacing the measurement sensor in a Z axis direction orthogonal to the XY plane and bringing the measurement sensor to face the interior wall; a W axis displacement mechanism displacing the measurement sensor facing the interior wall in a normal direction of the interior wall; and a θ axis displacement mechanism displacing the measurement sensor facing the interior wall along the interior wall.