公开(公告)号：US06285437B1

公开(公告)日：2001-09-04

申请号：US09220608

申请日：1998-12-28

申请人： Masateru Tokunaga

发明人： Masateru Tokunaga

IPC分类号： G03B2742

CPC分类号： G03F7/70358 ,  G03F7/70716 ,  G03F7/70725 ,  G03F7/709

摘要： In a scanning type exposure apparatus, a reticle coarse movement stage 22 and a wafer stage 20 are simultaneously scanned in a predetermined scanning direction or directions, in which a position control system 44 for a reticle fine movement stage detects a positional discrepancy amount between the wafer stage 20 and the reticle fine movement stage 24, and calculates a vibration amount of a vibration-preventive pedestal 12. The both stages 20, 22 are driven and controlled so that positional discrepancy is corrected on the basis of the detected positional discrepancy amount and the calculated vibration amount. Accordingly, even if a vibration occurs on the vibration-preventive pedestal 12 during acceleration for scanning for the stages 20, 22, an error affected by the vibration is taken into consideration, and correction is made at a predetermined time interval so that the positional relationship between the stages 20, 24 becomes a predetermined synchronized relationship.

摘要翻译： 在扫描型曝光装置中，在预定的扫描方向或方向上同时扫描标线粗略移动台22和晶片台20，在该扫描方向或方向上，用于掩模精细移动台的位置控制系统44检测晶片之间的位置偏差量 阶段20和光罩精细运动级24，并计算防振台座12的振动量。驱动和控制两级20,22，使得基于检测到的位置差异量校正位置偏差，并且 计算振动量。 因此，即使在用于阶段20,22的扫描的加速期间在防振台座12上发生振动，也考虑到受振动影响的误差，并且以预定的时间间隔进行校正，使得位置关系 阶段20,24之间变成预定的同步关系。

公开(公告)号：US5883702A

公开(公告)日：1999-03-16

申请号：US934728

申请日：1997-09-22

申请人： Masateru Tokunaga

发明人： Masateru Tokunaga

IPC分类号： H01L21/027 ,  G03F7/20 ,  G05B19/23 ,  G03B27/42 ,  G05B19/33

CPC分类号： G03F7/70216 ,  G03F7/70725 ,  G05B19/234 ,  G05B2219/37275 ,  G05B2219/42034 ,  G05B2219/49274

摘要： When the position of a stage is detected by interferometers, a converting means converts information detected by the interferometers into information on a position and a velocity of a center of gravity of the stage concerning each of degrees of freedom. PI controllers provided for each of the degrees of freedom determine control amounts for each of the degrees of freedom necessary for movement of the center of gravity by means of (proportional+integral) operation on the basis of velocity deviations in respective directions obtained as differences between values obtained by conversion into velocities from positional deviations of the center of gravity in the .theta., Y, X directions and velocities of the center of gravity in the respective directions. Outputs of the respective controllers are inputted into a converting means which converts the input into control amounts to be generated in motors 12, 14, 16, 18 respectively, and give the control amounts after the conversion as command values to the respective motors. Mutual interference between control means is effectively avoided when the stage is driven by using driving devices of a number larger than the degrees of freedom. The stage apparatus may be applied to an exposure apparatus.

摘要翻译： 当通过干涉仪检测到舞台的位置时，转换装置将由干涉仪检测到的信息转换成关于每个自由度的舞台的重心位置和速度的信息。 为每个自由度提供的PI控制器通过（比例+积分）运算来确定用于重心运动所需的每个自由度的控制量，该运动是基于获得的各个方向上的速度偏差，作为 通过在θ，Y，X方向上的重心的位置偏差和在各个方向上的重心速度从速度转换而获得的值。 各个控制器的输出被输入到转换装置，该转换装置将输入转换成在电动机12,14,16,18中产生的控制量，并将转换后的控制量作为对各个电动机的指令值。 当通过使用大于自由度的驱动装置驱动载物台时，有效地避免了控制装置之间的相互干涉。 舞台装置可以应用于曝光装置。