公开(公告)号：US5091683A

公开(公告)日：1992-02-25

申请号：US580642

申请日：1990-09-10

申请人： Akira Shimada

发明人： Akira Shimada

IPC分类号： G05B13/04 ,  G05B19/19 ,  G05B19/23 ,  G05B19/423 ,  G05D3/12

CPC分类号： G05B19/234 ,  G05B19/19 ,  G05B19/423 ,  G05B2219/36429 ,  G05B2219/41114 ,  G05B2219/41367

摘要： A servo control apparatus controls an object according to a target position signal and a detected position signal and drives the object according to a drive torque signal. The servo control apparatus includes an observer receptive of the drive torque signal and the detected position signal which determines an estimated disturbance torque in response thereto. A function unit produces an error command signal dependent on the estimated disturbance torque. The error command signal is successively subtracted from the target position signal to set a temporary position signal which is effective to impart a mechanical compliance to the control object.

摘要翻译： 伺服控制装置根据目标位置信号和检测到的位置信号来控制物体，并根据驱动转矩信号驱动物体。 伺服控制装置包括接受驱动转矩信号的观察者和检测到的位置信号，其响应于此确定估计的扰动转矩。 功能单元产生取决于估计的扰动转矩的错误命令信号。 从目标位置信号中连续减去误差指令信号，设定临时位置信号，该临时位置信号有效地赋予控制对象机械符合性。

公开(公告)号：US5883702A

公开(公告)日：1999-03-16

申请号：US934728

申请日：1997-09-22

申请人： Masateru Tokunaga

发明人： Masateru Tokunaga

IPC分类号： H01L21/027 ,  G03F7/20 ,  G05B19/23 ,  G03B27/42 ,  G05B19/33

CPC分类号： G03F7/70216 ,  G03F7/70725 ,  G05B19/234 ,  G05B2219/37275 ,  G05B2219/42034 ,  G05B2219/49274

摘要： When the position of a stage is detected by interferometers, a converting means converts information detected by the interferometers into information on a position and a velocity of a center of gravity of the stage concerning each of degrees of freedom. PI controllers provided for each of the degrees of freedom determine control amounts for each of the degrees of freedom necessary for movement of the center of gravity by means of (proportional+integral) operation on the basis of velocity deviations in respective directions obtained as differences between values obtained by conversion into velocities from positional deviations of the center of gravity in the .theta., Y, X directions and velocities of the center of gravity in the respective directions. Outputs of the respective controllers are inputted into a converting means which converts the input into control amounts to be generated in motors 12, 14, 16, 18 respectively, and give the control amounts after the conversion as command values to the respective motors. Mutual interference between control means is effectively avoided when the stage is driven by using driving devices of a number larger than the degrees of freedom. The stage apparatus may be applied to an exposure apparatus.

摘要翻译： 当通过干涉仪检测到舞台的位置时，转换装置将由干涉仪检测到的信息转换成关于每个自由度的舞台的重心位置和速度的信息。 为每个自由度提供的PI控制器通过（比例+积分）运算来确定用于重心运动所需的每个自由度的控制量，该运动是基于获得的各个方向上的速度偏差，作为 通过在θ，Y，X方向上的重心的位置偏差和在各个方向上的重心速度从速度转换而获得的值。 各个控制器的输出被输入到转换装置，该转换装置将输入转换成在电动机12,14,16,18中产生的控制量，并将转换后的控制量作为对各个电动机的指令值。 当通过使用大于自由度的驱动装置驱动载物台时，有效地避免了控制装置之间的相互干涉。 舞台装置可以应用于曝光装置。

公开(公告)号：US5175479A

公开(公告)日：1992-12-29

申请号：US654194

申请日：1991-02-12

申请人： Fumio Tajima ,  Hiroshi Katayama ,  Taizou Miyazaki ,  Shigeki Morinaga ,  Nobuyoshi Mutoh ,  Seiichi Narushima

发明人： Fumio Tajima ,  Hiroshi Katayama ,  Taizou Miyazaki ,  Shigeki Morinaga ,  Nobuyoshi Mutoh ,  Seiichi Narushima

IPC分类号： G11B5/588 ,  G05B13/02 ,  G05B19/23 ,  G05D3/12 ,  G11B5/55 ,  G11B15/467 ,  H02P6/06 ,  H02P6/08 ,  H02P27/06

CPC分类号： G11B5/5508 ,  G05B13/024 ,  G05B19/231 ,  G05B19/234

摘要： There is provided position error computing means for sampling an error value between a position detecting signal derived from means for detecting the position of a moving body and a position command signal supplied from outside and for computing a position error value on the basis of two or more past values of said error values. There is also provided a position control apparatus in which the magnitude of a gain of a position control loop is changed according to the above described position error value. Further, there is also provided a signal reproducing apparatus or a magnetic signal reproducing apparatus using the above described position control.

摘要翻译： 提供了一种位置误差计算装置，用于对从用于检测移动体的位置的装置和从外部提供的位置指令信号导出的位置检测信号之间的误差值进行采样，并且基于两个或更多个来计算位置误差值 所述错误值的过去值。 还提供了一种位置控制装置，其中位置控制环路的增益的大小根据上述位置误差值而改变。 此外，还提供了使用上述位置控制的信号再现装置或磁信号再现装置。

公开(公告)号：US4682089A

公开(公告)日：1987-07-21

申请号：US808499

申请日：1985-12-13

申请人： Masumi Tamari

发明人： Masumi Tamari

IPC分类号： G05B9/02 ,  B25J9/18 ,  G05B19/19 ,  G05B19/23 ,  G05B19/4062 ,  G05B19/42

CPC分类号： G05B19/234 ,  G05B19/4062 ,  G05B2219/40087 ,  G05B2219/42268 ,  G05B2219/42288 ,  G05B2219/50112

摘要： In a control system for a robot having a servo motor driving an operation axis, position error detecting means, detects an error of the actual position with reference to a desired instantaneous position, and a drive circuit receives the position error for supplying a current to the servo motor to reduce the position error. The control system is characterized by means for limiting the current supplied from the drive circuit to the servo motor thereby to limit the torque of the servo motor when the servo motor is driving the operation axis in a first mode in which movement of the operation axis is subject to undesired obstruction.

摘要翻译： 在具有驱动运转轴的伺服电动机的机器人的控制系统中，位置误差检测装置根据期望的瞬时位置检测实际位置的误差，驱动电路接收位置误差， 伺服电机减少位置误差。 该控制系统的特征在于，用于将从驱动电路供给到伺服电动机的电流限制在限制伺服电动机的转矩，当伺服电动机在运行轴的运动为第 受不理想的阻塞。

公开(公告)号：US4384244A

公开(公告)日：1983-05-17

申请号：US171645

申请日：1980-07-23

申请人： Mitsuo Matsumoto

发明人： Mitsuo Matsumoto

IPC分类号： G05B19/23 ,  H02P21/00 ,  H02P27/04 ,  H02P27/06 ,  H02P5/40

CPC分类号： G05B19/234 ,  H02P21/22

摘要： In a torque control system of an induction motor having m phase stator windings and P poles there are provided a torque instructor and a phase n voltage V.sub.ns generator responsive to a torque instruction given by the torque instructor to calculate the phase n voltage according to the following equation. ##EQU1## where ##EQU2## m: number of phases, n: 1, 2, . . . , m,P: number of poles,I.sub.o : constant exciting current (ampere),r.sub.s, r.sub.r, l.sub.r and l.sub.m : constants inherent to the induction motor,.theta.: rotor rotational angle (radian) of the induction motor, andI.sub.2 : instructed rotor current (ampere) proportional to an instructed torque.

摘要翻译： 在具有m相定子绕组和P极的感应电动机的转矩控制系统中，设置有扭矩指示器和相位n电压Vns发生器，其响应于由转矩指令器给出的转矩指令，以根据以下步骤计算相位n电压 方程。 + TR 其中 m：阶段数n：1,2。 。 。 ，m，P：极数，Io：恒定励磁电流（安培），rs，rr，lr和lm：感应电动机固有的常数，θ：感应电动机的转子旋转角度（弧度），I2：指示 转子电流（安培）与指令转矩成正比。

公开(公告)号：US4305029A

公开(公告)日：1981-12-08

申请号：US63847

申请日：1979-08-06

申请人： Shuichi Takahashi

发明人： Shuichi Takahashi

IPC分类号： H02P8/42 ,  G05B19/23 ,  G05B19/35 ,  G05B19/28

CPC分类号： G05B19/234 ,  G05B19/351 ,  G05B2219/43203

摘要： A polyphase synchronous motor is rotated by a unit incremental angle for each pulse input to the motor control circuit. The position error between the reference position and the controlled position of an object connected to the motor is detected. The direction of the motor rotation is controlled by the polarity of the detected position error, and the frequency of the input pulse to the motor control circuit is maintained to be proportional to the magnitude of the detected position error. But this frequency is limited in a predetermined range, when the magnitude of the detected position error exceeds the corresponding limit.

摘要翻译： 对于电机控制电路的每个脉冲输入，多相同步电机以单位递增角度旋转。 检测与电动机连接的物体的基准位置与受控位置之间的位置误差。 电动机旋转的方向由检测到的位置误差的极性控制，并且将电动机控制电路的输入脉冲的频率保持为与检测到的位置误差的大小成比例。 但是，当检测到的位置误差的大小超过相应的极限时，该频率在预定范围内被限制。

公开(公告)号：US09891274B2

公开(公告)日：2018-02-13

申请号：US14915171

申请日：2014-08-01

申请人： TOKYO ELECTRON LIMITED

发明人： Masataka Hatta ,  Kazunari Ishii

IPC分类号： G01R31/00 ,  G01R31/28 ,  G01R1/073 ,  G05B19/23 ,  G01R1/44

CPC分类号： G01R31/2891 ,  G01R1/07307 ,  G01R1/44 ,  G05B19/234

摘要： A device test method performed in a substrate test apparatus which includes a mounting table for mounting thereon a substrate on which a device having an electrode is formed, the mounting table being movable by a X-direction motor and a Y-direction motor, and a probe card arranged to face the mounting table. A measuring electrode is arranged to correspond to the electrode of the device, the probe card has a probe that is engageable with the measuring electrode, and the X-direction motor or Y-direction motor generates torque to keep the mounting table from moving when measuring an electrical characteristic of the device. In the device test method, after the probe is engaged with the measuring electrode, when measuring an electrical characteristic of the device, the maximum value of the torque generated by the X-direction motor or Y-direction motor is limited to a predetermined value or less.

公开(公告)号：US20020130567A1

公开(公告)日：2002-09-19

申请号：US10093802

申请日：2002-03-11

发明人： Yukinobu Kujira

IPC分类号： H02K011/00

CPC分类号： G05B19/234 ,  G05B2219/45242 ,  H02K7/1166 ,  H02K11/20 ,  H02K11/21 ,  H02K11/38

摘要： A motor actuator control system includes a motor actuator having a motor, an output shaft for outputting rotational motion of the motor at reduced rotational speed, and a gear train for transmitting the rotational motion to the output shaft while reducing rotational speed. The system further includes a first detector detecting a surge current generated at the moment that contact between a commutator and brushes in the motor is broken, a second detector detecting a predetermined rotational position of a gear, and a control unit controlling the motor on the basis of a signal from the first detector and another signal from the second detector. When the rotational position is detected, the position and the count of the surge current are correlated. Then, the motor is driven until the count reaches a predetermined number to rotate the output shaft to another predetermined rotational position.

摘要翻译： 电动机执行器控制系统包括具有马达的马达致动器，用于以降低的转速输出马达的旋转运动的输出轴以及用于在降低转速的同时将旋转运动传递到输出轴的齿轮系。 该系统还包括第一检测器，其检测在电动机中的换向器和电刷之间的接触断裂的时刻产生的浪涌电流，检测齿轮的预定旋转位置的第二检测器和基于该电动机控制电动机的控制单元 来自第一检测器的信号和来自第二检测器的另一信号。 当检测到旋转位置时，浪涌电流的位置和计数相关。 然后，马达被驱动直到计数达到预定数量，以将输出轴旋转到另一个预定旋转位置。

公开(公告)号：US5742143A

公开(公告)日：1998-04-21

申请号：US588699

申请日：1996-01-19

申请人： Takashi Katagiri

发明人： Takashi Katagiri

IPC分类号： G05B19/23 ,  G05B19/414 ,  H02P5/46 ,  H02P5/74 ,  H02P7/00

CPC分类号： G05B19/4142 ,  G05B19/234 ,  H02P5/46 ,  H02P5/74 ,  H02P2205/01

摘要： A motor control system for individually feedback-controlling a plurality of servomotors includes: a plurality of motor drive devices for converting DC power into AC power to drive the servomotors; current detecting devices for detecting the current value of the AC current to feed it back to the motor drive devices; and an A/D converter for converting the output signals of the current detecting devices into a digital signal. The motor drive devices, current detecting devices and A/D converter are accommodated in a casing for a group of servomotors, and the output terminals of the current detecting devices in the casing are connected in parallel to the input terminal of the A/D converter, so that the A/D converter is used for all of the current detecting devices in the casing. The resultant motor control system is small in the number of components, and accordingly in the number of wiring conductors, and is simple in construction and accordingly in adjustment work.

摘要翻译： 用于单独反馈控制多个伺服电动机的电动机控制系统包括：多个电动机驱动装置，用于将DC电力转换成AC电力以驱动伺服电动机; 电流检测装置，用于检测交流电流的当前值以将其馈送回电动机驱动装置; 以及用于将电流检测装置的输出信号转换为数字信号的A / D转换器。 马达驱动装置，电流检测装置和A / D转换器容纳在用于一组伺服电动机的壳体中，并且壳体中的电流检测装置的输出端子并联连接到A / D转换器的输入端子 ，使得A / D转换器用于壳体中的所有电流检测装置。 所得到的电动机控制系统的部件数量小，并且因此布线导体的数量小，结构简单，因此在调整工作中。

公开(公告)号：US20180335767A1

公开(公告)日：2018-11-22

申请号：US15965455

申请日：2018-04-27

申请人： KROHNE Messtechnik GmbH

发明人： Christian Koch

IPC分类号： G05B19/414 ,  G05B19/23

CPC分类号： G05B19/414 ,  G01D18/00 ,  G05B19/234 ,  G08C19/00 ,  H04Q9/00

摘要： A display device for process automation includes a display unit, a controller, a current loop interface and a fieldbus interface. The display device is designed for power supply via the current loop interface, and the controller is designed to assign an analog coded signal of an output data present at the current loop interface to a first input data and to display the first input data via the display unit. The controller is designed to request the transmission of the output data in the form of a digitally coded signal via the fieldbus interface, to receive the digitally coded signal via the fieldbus interface, to assign the digitally coded signal to a second input data, to perform a comparison between the first input data and the second input data, and to display a result of the comparison via the display unit.