公开(公告)号：US20100078753A1

公开(公告)日：2010-04-01

申请号：US12243941

申请日：2008-10-01

申请人： Mehran Mehregany ,  Nelsimar Moura Vandelli, JR.

发明人： Mehran Mehregany ,  Nelsimar Moura Vandelli, JR.

IPC分类号： H01L21/28 ,  H01L29/66

CPC分类号： G01F1/6888 ,  G01F1/6845

摘要： A method for forming a flow sensor having self-supported heat-carrying elements is disclosed. Self-supported heat-carrying elements are capable of operating with higher thermal efficiency, enabling lower power consumption and higher sensitivity, due to a lack of heat loss into a supporting membrane. Self-supported heat-carrying elements facilitate wider operating temperature range and compatibility with harsh media.

摘要翻译： 公开了一种用于形成具有自支承热承载元件的流量传感器的方法。 由于缺乏对支撑膜的热损失，自支撑的承载元件能够以更高的热效率运行，从而能够实现更低的功率消耗和更高的灵敏度。 自支撑的承载元件有助于更宽的工作温度范围和与苛刻介质的兼容性。